A thin-film temperature sensor with resistance to piezoresistive effect and method for detecting temperature
A thin-film temperature and sensor technology, applied in thermometers, thermometers and instruments using electrical/magnetic components directly sensitive to heat, etc., can solve problems such as temperature measurement errors, surface resistance line stretching or compression, and changing resistance values, etc. Achieve the effect of eliminating measurement errors, improving response speed, and thin thermal conductive layer
Active Publication Date: 2019-07-30
INST OF COMPUTING TECH CHINESE ACAD OF SCI
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[0003] Thin-film temperature sensors have the advantages of simple structure, fast response, easy processing, and low cost. However, when measuring temperature in seawater, especially in deep-sea high-pressure environments, the substrate material of the thin-film temperature sensor is easily affected by water pressure, water flow, And the deformation of the material due to water absorption or aging, etc., causing the stretching or compression of its surface resistance line, changing its resistance value. Since the thin film temperature sensor measures temperature through the thermal resistance effect, during its use, this piezoresistive effect The change in resistance value will be converted into temperature change, resulting in temperature measurement error or drift
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[0030] The basic principle of the present invention is as follows:
[0031] The relationship between the resistance value of metal or metal compound with temperature change can be approximated as a linear change, which is described by the following first-order polynomial:
[0032] R T =R T0 [1+α(T-T 0 )] [1]
[0033] where R T is the resistance value of the resistor at temperature T, R T0 for the resistance at temperature T 0 (generally 0°C, 20°C, 25°C) resistance value, and α is the temperature coefficient of resistance, which depends on the material of the resistance.
[0034] In order to improve the description accuracy, a 3rd degree polynomial can be used to describe the nonlinear relationship between temperature and resistance value:
[0035] R T =R T0 [1+α 1 (T-T 0 )+α 2 (T-T 0 ) 2 +α 3 (T-T 0 ) 3 ] [2]
[0036] where a 1 , α 2 , α 3 is the temperature coefficient in the form of coefficients of a 3rd degree polynomial, , depending on the material of ...
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Abstract
The invention provides a film temperature sensor withstanding piezoresistive effects and a method for detecting temperature, and relates to the technical field of ocean sensing and measuring. The film temperature sensor includes an insulating substrate, a first thermal resistance serpentine curve, a second thermal resistance serpentine curve, a thermal resistance connecting wire, a pad, and an insulating layer. The first thermal resistance serpentine curve and the second thermal resistance serpentine curve approach each other and do not cross each other. The first thermal resistance serpentine curve and the second thermal resistance serpentine curve are respectively welded to the pad through the thermal resistance connecting wire. The pad is disposed on the insulating substrate. The insulating layer covers the first thermal resistance serpentine curve, the second thermal resistance serpentine curve, and the thermal resistance connecting wire. According to the invention, the film temperature sensor and the method can reduce or eliminate errors brought by piezoresistive effects in measuring by current film temperature sensors, and achieve high-precision measuring carried out in environments having great pressures like deep sea.
Description
technical field [0001] The invention relates to the technical field of ocean sensing and measurement, in particular to a film temperature sensor resistant to piezoresistive effect and a method for detecting temperature. Background technique [0002] Conductivity, temperature, and depth sensors (CTD or temperature, salinity and depth sensor for short) are the most basic and important sensors for monitoring the marine environment. They not only directly provide temperature parameters, but also It can be used to calculate the salinity parameters of seawater, which are essential to carry out various oceanographic researches. The research provides background physical parameters, which is of great significance in studying global climate issues and monitoring the marine ecological environment. At the same time, temperature and salinity parameters also provide essential background compensation parameters for various other ocean sensors. [0003] Thin-film temperature sensors have t...
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IPC IPC(8): G01K7/18G01K7/22
CPCG01K7/183G01K7/223
Inventor 黄希崔莉
Owner INST OF COMPUTING TECH CHINESE ACAD OF SCI
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