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A Method of Reducing Mechanical Phase Shift Error in Spherical Mirror Surface Error Measurement

A technology of mechanical phase shifting and error measurement, which is applied in the field of optical measurement, can solve the problems of high price and large phase shifting error, and achieve the effect of high-precision measurement

Active Publication Date: 2019-02-22
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Description
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  • Application Information

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Problems solved by technology

However, when measuring the shape error of a high-precision high-NA spherical mirror, the high-NA spherical standard mirror will introduce a large phase shift error
When the MST series interferometer is used to measure the shape error of a high NA spherical mirror, this problem can be solved well, but the MST series interferometer is very expensive

Method used

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  • A Method of Reducing Mechanical Phase Shift Error in Spherical Mirror Surface Error Measurement
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  • A Method of Reducing Mechanical Phase Shift Error in Spherical Mirror Surface Error Measurement

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Embodiment Construction

[0038] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0039] Such as figure 1 Shown, for the present invention a kind of measuring device that reduces the method for mechanical phase shift error in the spherical mirror shape error measurement that adopts, comprises interferometer (10), spherical standard mirror (20), standard spherical wave (30), waits for Measuring the spherical mirror (40) and the five-dimensional adjustment table (50), in order to reduce the influence of the mechan...

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Abstract

The invention proposes a method for reducing a mechanical phase shift error in the surface shape error measurement of a spherical mirror, and a measurement system employed in the method comprises an interferometer, a spherical standard mirror, a standard spherical wave, a to-be-measured spherical mirror, and a five-dimensional adjustment platform. The method comprises the steps: dividing the to-be-measured spherical mirror into a plurality of annular subaperture parts according to the NA size of the to-be-measured spherical mirror and the control requirements of the phase shift error, wherein different subaperture parts employ different phase shift steps; and achieving the measurement of the surface shape error of the whole spherical mirror in a mode of subaperture part splicing. The new method achieves the high-precision measurement of the surface shape error of a high-numerical-aperture spherical mirror at low cost through changing the phase shift step.

Description

technical field [0001] The invention relates to the field of optical measurement, in particular to a method for reducing mechanical phase shift errors in spherical mirror surface shape error measurement. Background technique [0002] Spherical mirror is the most basic and important component in the optical system. With the continuous improvement of the performance requirements of the optical system, the requirements for the shape accuracy of the spherical mirror are also getting higher and higher. The measurement of the surface error of the high-precision spherical mirror is the basis for ensuring the processing accuracy of the spherical mirror. [0003] Spherical mirror surface shape error measurement can use methods such as Fizeau interferometer, Tieman-Green interferometer or point diffraction interferometer. The Fizeau interferometer is widely used due to its common optical path and other advantages. At present, there are two types of phase shifting methods for Fizeau ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/02056G01B11/2441
Inventor 卢增雄齐月静齐威杨光华苏佳妮周翊王宇
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI