Substrate processing equipment and alignment control method of to-be-processed substrate

Abstract

The embodiment of the invention provides substrate processing equipment and an alignment control method of a to-be-processed substrate, and relates to the semiconductor technical field. When the substrate processing equipment positions the to-be-processed substrate in the prior art, the alignment result may be inaccurate because alignment marks are poor in reflective performance; the substrate processing equipment can solve said problems, and comprises the following units: a carrier deck used for bearing the to-be-processed substrate, wherein the to-be-processed substrate has alignment marks made of shading material; a light source arranged on one side of the carrier deck; an image sensor arranged on the other side of the carrier deck, wherein the light source is used for sending lights to the to-be-processed substrate; the light reaches the image sensor through the to-be-processed substrate, the image sensor can collect the image containing the alignment marks; the irradiation zone of the light source at least covers the outer edges of the alignment marks.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to substrate processing equipment and a method for controlling alignment of substrates to be processed. Background technique [0002] TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Transistor-Liquid Crystal Display, Thin Film Transistor-Liquid Crystal Display) usually includes an array substrate and a color filter substrate that are boxed to each other, and a liquid crystal layer that is sealed between the array substrate and the color filter substrate that are boxed to each other. There are pixel electrodes and common electrodes for forming an electric field on the liquid crystal display panel, and an electric field is generated between the pixel electrodes and the common electrodes by applying a voltage to control the deflection direction of the liquid crystal molecules of the liquid crystal layer and control the polarization of incident light, thereby gener...

AI Technical Summary

Problems solved by technology

[0006] Embodiments of the present invention provide a substrate processing equipment and a method for controlling the alignment of substrates to be processed, which can solve the problem of inaccurate alignment results due to poor reflective performance of alignment marks when substrate processing equipment aligns substrates to be processed question

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