A repair system and repair method for a signal line
A repair system and repair method technology, applied in nonlinear optics, instruments, optics, etc., can solve problems such as short circuit of crossed signal lines, repair failure, missed inspection and missed repair, etc., so as to avoid the risk of missed inspection and missed repair and avoid short circuits. Effect
Active Publication Date: 2020-03-06
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0004] It can be seen that if the existing CVD equipment is used to repair the broken signal line, there will be risks such as short circuit between crossed signal lines, missed inspection and repair, or repair failure. Therefore, how to provide a method that can avoid the above repair risks The repair system of the signal line is a technical problem urgently needed by those skilled in the art
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[0055] The specific implementation manners of the signal line repair system and repair method provided by the embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0056] The shapes and sizes of the components in the drawings do not reflect their true proportions, but are only intended to schematically illustrate the content of the present invention.
[0057] A signal line repair system provided by an embodiment of the present invention, such as image 3 As shown, it includes: a first repairing device 301 for forming a conductive repairing line and a second repairing device 302 for forming an insulating layer.
[0058] The above-mentioned repair system provided by the embodiment of the present invention can not only form a conductive repair line, but also form an insulating layer; for the situation that the two intersecting signal lines are both disconnected at the crossing position, the first repair device can be...
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The invention discloses a signal line repairing system and a signal line repairing method. The signal line repairing system comprises a first repairing device and a second repairing device which are respectively used for forming repairing lines and an insulation layer; for the situation of open circuit occurring at the intersection of two intersectional signal lines, one of the signal lines is repaired by the aid of the first repairing device, then the insulation layer is formed by the aid of the second repairing device, and finally the other signal line is repaired by the aid of the first repairing device. Therefore, short circuit between the signal lines can be avoided, and risk of repairing failure by designing the repairing line of one of signal lines into the repairing line away from the other signal line can be avoided; for the situation that the open circuit occurring at the intersection of the lower signal line is detected after the two intersectional signal lines are formed, the insulation layer is formed by the aid of the second repairing device, and the lower signal line is repaired by the aid of the first repairing device; short circuit between the signal lines can be avoided, and risk of leak and repair leakage caused by untimely repairing can be avoided.
Description
technical field [0001] The invention relates to the field of display technology, in particular to a signal line repair system and repair method. Background technique [0002] During the manufacturing process of the display substrate, due to factors such as process deviation, operation error, and environment, the problem of disconnection of the signal line may occur. To solve such problems, a chemical vapor deposition (Chemical Vapor Deposition, CVD) device is generally used to deposit metal materials to form a repair line, and to electrically connect the two disconnected signal lines. [0003] Taking the array substrate in the liquid crystal display panel as an example, such as Figure 1a As shown, after the pattern of the data line 103 is formed on the base substrate 102 formed with the gate line 101, it is detected that the gate line 101 is at the intersection of the gate line 101 and the data line 103 (such as Figure 1a shown in the dotted line box) an open circuit occur...
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IPC IPC(8): G02F1/13G02F1/1362
CPCG02F1/1309G02F1/136259G02F1/136263
Inventor 汪雯王海涛田牛
Owner BOE TECH GRP CO LTD