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Online test device and test method of material radiation induced air bleeding

An online test and radiation cavity technology, applied in the field of measurement, can solve the problems of different calculation rules, many vacuum chambers, and high system cost, and achieve the effects of convenient operation, avoiding radiation influence, and simple device structure

Active Publication Date: 2017-06-09
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0006] China has authorized the patent "Composite material outgassing rate test system and method with self-calibration function", the publication number is CN201210431477, the device has many vacuum chambers, the structure is extremely complex, and the system cost is very high
Although it pointed out that the test accuracy can be increased by calibrating the sensitivity of the mass spectrometer, the actual partial pressure calculation of the mass spectrometer is not only related to the sensitivity, but also involves ionization probability, graph coefficient, conversion factor and detection factor, etc., which is very complicated; and the current market The calculation rules of most mass spectrometers in the world are also slightly different

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  • Online test device and test method of material radiation induced air bleeding
  • Online test device and test method of material radiation induced air bleeding
  • Online test device and test method of material radiation induced air bleeding

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Embodiment Construction

[0060] Hereinafter, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. Although the drawings show exemplary embodiments of the present disclosure, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0061] The embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0062] Such as figure 2 As shown, the embodiment of the present invention discloses an online testing device for material radiation-induced degassing under vacuum conditions. The device includes a vacuum chamber system, a radiation chamber system, an air extraction system, an air supply sy...

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Abstract

The invention discloses an online test device of material radiation induced air bleeding. The device comprises a vacuum chamber system, a radiation chamber system, an air pumping system, an air supply system, a detection component and a numerical control acquisition unit. The invention also provides two methods for testing the quantity of material radiation induced air bleeding, namely a dynamic method and a mass spectrometry, and both can realize a online real-time test; the total quantity of radiation induced air bleeding of the same sample can be tested by the dynamic method and mass spectrometry together; and the mass spectrometry also can accurately measure the air bleeding quantity of each component of radiation induced air bleeding. The device is simple in structure and convenient to operate and can calibrate the mass spectrometer and effective pumping speed, and thus the test result is more real and accurate.

Description

Technical field [0001] The invention relates to the field of measurement technology, in particular to an online testing device and a testing method for material radiation-induced outgassing under vacuum conditions. Background technique [0002] Any solid material will be desorbed and outgassed when placed in a vacuum environment. In the fields of satellites, spacecraft, space and some semiconductors, the vacuum material will accelerate the outgassing process due to the radiation of light, heat or electron beams, and the released part Gas will deteriorate the original vacuum environment and cause some optical components to fail. Accurate analysis of the outgassing behavior of materials under vacuum radiation conditions is an important basis for evaluating the vacuum performance of materials, including accurate acquisition of radiation-induced outgassing, outgassing components and radiation-induced outgassing components. [0003] China has authorized a patent "A device and method fo...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/62
CPCG01N27/62
Inventor 罗艳吴晓斌王魁波陈进新谢婉露张罗莎
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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