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An online test device and test method for material radiation-induced outgassing

An online test and radiation cavity technology, applied in the field of measurement, can solve the problems of different calculation rules, many vacuum chambers, and high system cost, and achieve the effects of convenient operation, avoiding radiation influence, and simple device structure

Active Publication Date: 2021-02-02
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] China has authorized the patent "Composite material outgassing rate test system and method with self-calibration function", the publication number is CN201210431477, the device has many vacuum chambers, the structure is extremely complex, and the system cost is very high
Although it pointed out that the test accuracy can be increased by calibrating the sensitivity of the mass spectrometer, the actual partial pressure calculation of the mass spectrometer is not only related to the sensitivity, but also involves ionization probability, graph coefficient, conversion factor and detection factor, etc., which is very complicated; and the current market The calculation rules of most mass spectrometers in the world are also slightly different

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  • An online test device and test method for material radiation-induced outgassing
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  • An online test device and test method for material radiation-induced outgassing

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Embodiment Construction

[0060] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0061] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0062] Such as figure 2 As shown, the embodiment of the present invention discloses an online test device for radiation-induced outgassing of materials under vacuum conditions, the device includes a vacuum chamber system, a radiation chamber system, an air extraction system, an air supply system, a detecti...

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Abstract

The invention discloses an on-line test device for outgassing caused by radiation of materials. The device comprises a vacuum chamber system, a radiation chamber system, an air extraction system, an air supply system, a detection component and a numerical control acquisition unit. The present invention also proposes two methods for testing the amount of radiation-induced outgassing of materials: a dynamic method and a mass spectrometry method, both of which can be tested in real time on-line. The outgassing component of each component of radiation-induced outgassing can be accurately measured. The device has simple structure and convenient operation, and can calibrate the mass spectrometer and effective pumping speed, so that the test results are more real and accurate.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to an on-line test device and a test method for material radiation-induced outgassing under vacuum conditions. Background technique [0002] Any solid material placed in a vacuum environment will desorb and degas. In the fields of satellites, spacecraft, space, and certain semiconductors, vacuum materials undergo accelerated degassing processes due to radiation from light, heat, or electron beams. The released part The gas will deteriorate the original vacuum environment, causing some optical components to fail. Accurately analyzing the outgassing behavior of materials under vacuum radiation conditions is an important basis for evaluating the vacuum performance of materials, including accurately obtaining the amount of radiation-induced outgassing, outgassing components, and radiation-induced outgassing components. [0003] China has authorized a patent "a device and method fo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/62
CPCG01N27/62
Inventor 罗艳吴晓斌王魁波陈进新谢婉露张罗莎
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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