Roll-type graphene continuous growth equipment

Abstract

The invention discloses coiled graphene continuous growing equipment which is capable of synchronously carrying out high temperature annealing pretreatment and high temperature growth on a graphene growing substrate. The coiled graphene continuous growing equipment comprises a pay-off cooling cavity, a take-up cooling cavity, a first high temperature process cavity, a second high temperature process cavity and a transitional cavity, wherein the pay-off cooling cavity and the take-up cooling cavity are both provided with vacuum pumps; flow equalization and heat isolation devices are arranged at two ends of the first high temperature process cavity and two ends of the second high temperature process cavity; heaters are arranged on both of the first high temperature process cavity and the second high temperature process cavity; the graphene growing substrate on a graphene growing substrate pay-off roller passes through a pay-off cooling region guide roller, the first high temperature process cavity, the transitional cavity, the second high temperature process cavity and a take-up cooling cavity guide roller in sequence, and is finally coiled onto a graphene substrate take-up roller. By the adoption of the coiled graphene continuous growing equipment, the final quality of a graphene thin film can be guaranteed, and the production efficiency is improved.

Description

technical field [0001] The invention relates to a graphene growth device, in particular to a roll-type graphene continuous growth device. Background technique [0002] It is well known that although graphene is only one carbon atomic layer thick, due to its own structural characteristics, it shows the best in many worlds, such as the thinnest, lightest, toughest, and smallest resistivity. Graphene is called the material world. "Black Gold", the "King of New Materials" in the 21st century. [0003] The large-scale preparation of graphene thin films, after extensive research in recent years, chemical vapor deposition is one of the most promising methods for large-scale preparation of graphene thin films. The CVD method to prepare high-quality graphene film is to heat and decompose the carbon source into activated carbon groups under a vacuum condition of about 1000 degrees, and then further decompose on transition metal substrates such as Cu and Ni to form graphene. However,...

AI Technical Summary

Problems solved by technology

In recent years, although patents have begun to study roll-to-roll graphene production equipment and processes, it is difficult to achieve controllable production of high-quality graphene because only one high-temperature process chamber is set up, and annealing and growth are carried out at the same time.

For a high-temperature process chamber, if roll-to-roll high-temperature annealing is performed first, and then rolled back to grow roll-to-roll graphene, the growth efficiency of graphene will be seriously affected.

In addition, the previous patents did not consider the impact of high temperature heat radiation on the sealing device and the uniform distribution of gas in the process chamber

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