Transversely arranged multi-cavity continuous graphene growth equipment

A graphene and multi-chamber technology, which is applied in the field of multi-chamber graphene continuous growth equipment, can solve the problem that it is difficult to achieve high-quality graphene controllable preparation, without considering that the sealing device affects the uniform distribution of gas in the process chamber and affects the graphite ene growth efficiency and other issues, to achieve the effect of solving freedom, ensuring quality, and ensuring quality

Pending Publication Date: 2017-06-13
CHONGQING GRAPHENE TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In recent years, although patents have begun to study roll-to-roll graphene production equipment and processes, it is difficult to achieve controllable production of high-quality graphene because only one high-temperature process chamber is set up, and annealing and growth are carried out at the same time.
For a high-temperature process chamber, if roll-to-roll high-temperature annealing is performed first, and then rolled back to grow roll-to-roll graphene, the growth efficiency of graphene will be seriously affected.
In addition, the previous patents did not consider the impact of high temperature heat radiation on the sealing device and the uniform distribution of gas in the process chamber

Method used

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  • Transversely arranged multi-cavity continuous graphene growth equipment
  • Transversely arranged multi-cavity continuous graphene growth equipment
  • Transversely arranged multi-cavity continuous graphene growth equipment

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Embodiment 1

[0041] like figure 1 , 2 , 3, the horizontally arranged multi-chamber graphene continuous growth equipment includes a discharge cooling chamber 1 and a receiving cooling chamber 4; a graphene growth substrate discharge roller 11 is arranged in the discharge cooling chamber 1 And discharge cooling zone guide roller 12, described receiving cooling chamber 4 is provided with long graphene substrate receiving roller 41 and receiving cooling chamber guide roller 42; Described discharging cooling chamber 1 is provided with a vacuum pump 7, The receiving cooling chamber 4 is provided with a vacuum pump 7 .

[0042] The horizontally arranged multi-chamber graphene continuous growth equipment also includes a first high-temperature process chamber 2, a second high-temperature process chamber 3, and a transition chamber 5; both ends of the first high-temperature process chamber 2 and the second high-temperature process chamber Both ends of the chamber 3 are provided with uniform flow h...

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Abstract

The invention discloses transversely arranged multi-cavity continuous graphene growth equipment which is convenient for detecting graphene growth thin film tension. The continuous graphene growth equipment comprises a vacuum pump for vacuumizing a material discharging cooling cavity and a material collection cooling cavity, the material discharging cooling cavity, the material collection cooling cavity and a first high-temperature process cavity, a second high-temperature process cavity and a transitional cavity which are all transversely arranged, wherein a tension detection device is arranged in the transitional cavity; flow equalizing and heat isolating devices are arranged at two ends of the first high-temperature process cavity and two ends of the second high-temperature process cavity; heaters are arranged on the first high-temperature process cavity and the second high-temperature process cavity; a discharged graphene growth substrate on a graphene growth substrate discharging roller passes through a material discharging cooling cavity guide roller, the first high-temperature process cavity, the transitional cavity, the second high-temperature process cavity and a material collection cooling cavity guide roller in sequence and is finally wound on a graphene substrate collection roller. By the adoption of the transversely arranged multi-cavity continuous graphene growth equipment, the final quality of a graphene thin film can be guaranteed, and the production efficiency is improved.

Description

technical field [0001] The invention relates to a graphene growth device, in particular to a horizontally arranged multi-chamber graphene continuous growth device. Background technique [0002] It is well known that although graphene is only one carbon atomic layer thick, due to its own structural characteristics, it shows the best in many worlds, such as the thinnest, lightest, toughest, and smallest resistivity. Graphene is called the material world. "Black Gold", the "King of New Materials" in the 21st century. [0003] The large-scale preparation of graphene thin films, after extensive research in recent years, chemical vapor deposition is one of the most promising methods for large-scale preparation of graphene thin films. The CVD method to prepare high-quality graphene film is to heat and decompose the carbon source into activated carbon groups under a vacuum condition of about 1000 degrees, and then further decompose on transition metal substrates such as Cu and Ni t...

Claims

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Application Information

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IPC IPC(8): C01B32/186
Inventor 李占成伍俊史浩飞李昕黄德萍段银武张永娜余杰
Owner CHONGQING GRAPHENE TECH
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