Transversely arranged multi-cavity continuous graphene growth equipment

Abstract

The invention discloses transversely arranged multi-cavity continuous graphene growth equipment which is convenient for detecting graphene growth thin film tension. The continuous graphene growth equipment comprises a vacuum pump for vacuumizing a material discharging cooling cavity and a material collection cooling cavity, the material discharging cooling cavity, the material collection cooling cavity and a first high-temperature process cavity, a second high-temperature process cavity and a transitional cavity which are all transversely arranged, wherein a tension detection device is arranged in the transitional cavity; flow equalizing and heat isolating devices are arranged at two ends of the first high-temperature process cavity and two ends of the second high-temperature process cavity; heaters are arranged on the first high-temperature process cavity and the second high-temperature process cavity; a discharged graphene growth substrate on a graphene growth substrate discharging roller passes through a material discharging cooling cavity guide roller, the first high-temperature process cavity, the transitional cavity, the second high-temperature process cavity and a material collection cooling cavity guide roller in sequence and is finally wound on a graphene substrate collection roller. By the adoption of the transversely arranged multi-cavity continuous graphene growth equipment, the final quality of a graphene thin film can be guaranteed, and the production efficiency is improved.

Description

technical field [0001] The invention relates to a graphene growth device, in particular to a horizontally arranged multi-chamber graphene continuous growth device. Background technique [0002] It is well known that although graphene is only one carbon atomic layer thick, due to its own structural characteristics, it shows the best in many worlds, such as the thinnest, lightest, toughest, and smallest resistivity. Graphene is called the material world. "Black Gold", the "King of New Materials" in the 21st century. [0003] The large-scale preparation of graphene thin films, after extensive research in recent years, chemical vapor deposition is one of the most promising methods for large-scale preparation of graphene thin films. The CVD method to prepare high-quality graphene film is to heat and decompose the carbon source into activated carbon groups under a vacuum condition of about 1000 degrees, and then further decompose on transition metal substrates such as Cu and Ni t...

AI Technical Summary

Problems solved by technology

In recent years, although patents have begun to study roll-to-roll graphene production equipment and processes, it is difficult to achieve controllable production of high-quality graphene because only one high-temperature process chamber is set up, and annealing and growth are carried out at the same time.

For a high-temperature process chamber, if roll-to-roll high-temperature annealing is performed first, and then rolled back to grow roll-to-roll graphene, the growth efficiency of graphene will be seriously affected.

In addition, the previous patents did not consider the impact of high temperature heat radiation on the sealing device and the uniform distribution of gas in the process chamber

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