Graphene continuous growth equipment with vertically arranged high-temperature process chamber

Abstract

The invention discloses continuous graphene growth equipment with a vertically arranged high-temperature process cavity, and aims to reduce the influence of the gravity to the formation quality of graphene. The continuous graphene growth equipment comprises a vacuum pump, a discharged material cooling cavity, a collected material cooling cavity, a transition cavity, a first high-temperature process cavity and a second high-temperature process cavity, wherein the vacuum pump is used for vacuuming the discharged material cooling cavity and the collected material cooling cavity; the first high-temperature process cavity and the second high-temperature process cavity are both vertically arranged; flow evening thermal-insulating devices are arranged at two ends of the first high-temperature process cavity and the second high-temperature process cavity; both the first high-temperature process cavity and the second high-temperature process cavity are provided with heaters; and a graphene growth substrate is placed on a graphene growth substrate discharge roller, passes through a discharged material cooling zone guide roller, the first high-temperature process cavity, the transition cavity, the second high-temperature process cavity and a collected material cooling cavity guide roller, and is finally coiled onto a graphene substrate collecting roller. By adopting the continuous graphene growth equipment, the influence of the gravity to the product quality can be reduced, the final quality of a graphene film can be ensured, and the production efficiency can be improved.

Description

technical field [0001] The invention relates to a graphene growth device, in particular to a graphene continuous growth device with vertically arranged high-temperature process chambers. Background technique [0002] It is well known that although graphene is only one carbon atomic layer thick, due to its own structural characteristics, it shows the best in many worlds, such as the thinnest, lightest, toughest, and smallest resistivity. Graphene is called the material world. "Black Gold", the "King of New Materials" in the 21st century. [0003] The large-scale preparation of graphene thin films, after extensive research in recent years, chemical vapor deposition is one of the most promising methods for large-scale preparation of graphene thin films. The CVD method to prepare high-quality graphene film is to heat and decompose the carbon source into activated carbon groups under a vacuum condition of about 1000 degrees, and then further decompose on transition metal substra...

AI Technical Summary

Problems solved by technology

In recent years, although patents have begun to study roll-to-roll graphene production equipment and processes, it is difficult to achieve controllable production of high-quality graphene because only one high-temperature process chamber is set up, and annealing and growth are carried out at the same time.

For a high-temperature process chamber, if roll-to-roll high-temperature annealing is performed first, and then rolled back to grow roll-to-roll graphene, the growth efficiency of graphene will be seriously affected.

In addition, the previous patents did not consider the impact of high temperature heat radiation on the sealing device and the uniform distribution of gas in the process chamber

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