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Vibration module and gyroscope

A technology of gyroscopes and mass blocks, which is applied in the field of gyroscopes and can solve the problems of reduced sensitivity of gyroscope mass blocks to rotational angular velocity

Active Publication Date: 2017-06-20
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of the cross beam is that the vibration of the two sets of mass blocks set in the X+ and X- (or Y+ and Y-) directions will be transmitted to the mass blocks in the Y+ and Y- (or X+ and X-) directions, resulting in Reduced sensitivity of gyro-mass to rotational angular velocity

Method used

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  • Vibration module and gyroscope
  • Vibration module and gyroscope
  • Vibration module and gyroscope

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Embodiment Construction

[0023] The specific implementation manners of the vibration module and the gyroscope provided by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0024] attached figure 1 Shown is a schematic diagram of the XY plane structure of the gyroscope described in this specific embodiment, including a vibration module. The vibration module includes a first cantilever beam 11 along the X direction and a second cantilever beam 12 along the Y direction arranged in the XY plane and connected to each other. The first cantilever beam 11 and the second cantilever beam 12 are perpendicular to each other. The end of the first cantilever beam 11 is connected to the first mass block 11M, and the end of the second cantilever beam 12 is connected to the second mass block 12M.

[0025] attached Figure 2A shown is attached figure 1 A schematic diagram of the connection structure between the first cantilever beam 11 and the first mass 11M th...

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PUM

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Abstract

A gyroscope includes a vibration module; the vibration module is used for detecting a vibration signal outside an XY plane; the vibration module includes a first cantilever beam along an X direction and a second cantilever beam along a Y direction in the XY plane, and the first cantilever beam and the second cantilever beam are perpendicular to each other and connected to each other; the tail end of the first cantilever beam is connected with a first mass block, and the tail end of the second cantilever beam is connected with a second mass block; a connection structure between at least one mass block and the corresponding cantilever beam includes a folding beam, and the arrangement direction of the folding beam is perpendicular to the axial direction of the cantilever beam provided with the folding beam.

Description

technical field [0001] The invention relates to the field of micro-mechanical technology, in particular to a vibration module and a gyroscope using the vibration module. Background technique [0002] The MEMS (Micro Electro Mechanical System, Micro Electro Mechanical System) gyroscope utilizes the Coriolis force (Coriolis force, also called Coriolis force) phenomenon. The Coriolis force is a description of the offset of the linear motion of a particle in a rotating system due to inertia relative to the linear motion of the rotating system. The Coriolis force comes from the inertia of the object's motion. The particle moving in a straight line in the rotating system has a tendency to continue moving along the original direction of motion due to the inertia. However, because the system itself is rotating, in the After a period of movement, the position of the particle in the system will change, and the direction of its original movement trend will deviate to a certain extent ...

Claims

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Application Information

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IPC IPC(8): G01C19/5656
CPCG01C19/5656
Inventor 裘进郭慧芳
Owner QST CORP