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Silicon wafer detection device

A detection device and silicon wafer technology, which is applied in semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve problems affecting the quality of silicon wafers, low detection efficiency, scratches, etc., to improve detection efficiency and accuracy rate and reduce the effect of misjudgment rate

Active Publication Date: 2017-06-23
EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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  • Claims
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Problems solved by technology

[0003] The technical problem to be solved by the present invention is: in order to solve the problem that in the prior art, when silicon wafers are detected, artificial flipping is required, resulting in low detection efficiency, and the silicon wafers are directly tiled on the workbench, which easily leads to contact between the silicon wafers and the workbench. There are scratches on the surface, which affect the quality of silicon wafers. A silicon wafer detection device is now provided

Method used

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Examples

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Embodiment 1

[0020] Such as Figure 1-4 As shown, a silicon wafer detection device includes a support 1, a workbench 2 is arranged on the support 1, a platform 4 is arranged on the upper surface of the workbench 2 through a rotating shaft 3, and a platform 4 is provided on the lower surface of the workbench 2. The rotating motor 5, the output end of the motor 5 is connected to the rotating shaft 3, the upper surface of the platform 4 is provided with a left fixed plate 6 and a right fixed plate 7, and the inner surfaces of the left fixed plate 6 and the right fixed plate 7 are provided with an air bag 8 , the lower surface of the platform 4 is provided with an air pump 9, the air pump 9 communicates with the air bag 8, and the pipeline connecting the air pump 9 and the air bag 8 is connected in series with a check valve.

[0021] The platform 4 is provided with a crossbar 10 for placing silicon wafers 22. The upper surface of the crossbar 10 is a plane. One nozzle 11 and the second nozzle...

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Abstract

The invention relates to the technical field of a solar cell sheet, particularly to a silicon wafer detection device comprising a support frame. A work bench is arranged at the support frame; a platform is arranged at the upper surface of the work bench by a rotating shaft in a rotating manner; and a motor for driving the rotation of the platform is arranged at the lower surface of the work bench. The upper surface of the platform is provided with a left fixed plate and a right fixing plate; air bags are arranged at the inner side surfaces of the left fixed plate and the right fixed plate; and an air pump is arranged at the lower surface of the platform and is communicated with the air bag. According to the a silicon wafer detection device, the narrow surface of the silicon wafer is clamped by the air bags, so that the silicon wafer is not damaged by clamping and thus observation on the front side and the back side of the silicon wafer is not affected; and because the motor drives the platform to make rotation, observation on the front side and the back side of the silicon wafer can be completed without the need to turn over the silicon wafer manually, so that the detection efficiency can be improved substantially, the accuracy of detection can be enhanced, and the misjudgment rate can be reduced.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a silicon wafer detection device. Background technique [0002] Silicon wafers are the carrier of solar cells. The quality of silicon wafers directly determines the conversion efficiency of solar cells. Therefore, it is necessary to inspect incoming silicon wafers. When detecting whether there are defects on the surface of silicon wafers, one of the items includes Manually observe the surface of the silicon wafer. At present, when the silicon wafer is inspected, it is necessary to manually place the silicon wafer on the workbench, first observe whether the front of the silicon wafer is defective, and then turn the silicon wafer so that the back is facing upward Then observe whether there is any defect on the back of the silicon wafer. The problem with the above method is that the silicon wafer needs to be manually turned over, resulting in low detection efficiency, and the si...

Claims

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Application Information

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IPC IPC(8): H01L21/66H01L21/687
CPCH01L21/68721H01L21/68792H01L22/12Y02E10/50
Inventor 孙铁囤姚伟忠汤平
Owner EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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