Silicon wafer detection device
A detection device and silicon wafer technology, which is applied in semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve problems affecting the quality of silicon wafers, low detection efficiency, scratches, etc., to improve detection efficiency and accuracy rate and reduce the effect of misjudgment rate
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[0020] Such as Figure 1-4 As shown, a silicon wafer detection device includes a support 1, a workbench 2 is arranged on the support 1, a platform 4 is arranged on the upper surface of the workbench 2 through a rotating shaft 3, and a platform 4 is provided on the lower surface of the workbench 2. The rotating motor 5, the output end of the motor 5 is connected to the rotating shaft 3, the upper surface of the platform 4 is provided with a left fixed plate 6 and a right fixed plate 7, and the inner surfaces of the left fixed plate 6 and the right fixed plate 7 are provided with an air bag 8 , the lower surface of the platform 4 is provided with an air pump 9, the air pump 9 communicates with the air bag 8, and the pipeline connecting the air pump 9 and the air bag 8 is connected in series with a check valve.
[0021] The platform 4 is provided with a crossbar 10 for placing silicon wafers 22. The upper surface of the crossbar 10 is a plane. One nozzle 11 and the second nozzle...
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