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A kind of flexible pressure sensor and preparation method thereof

A pressure sensor and flexible technology, applied in the field of sensors, can solve the problems of complex preparation, short response time, and low sensitivity of flexible pressure sensors, and achieve the effects of wide range of pressure measurement, low cost, and high sensitivity

Active Publication Date: 2019-06-07
芜湖芯硅智电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] What the present invention is to solve is the technical problem of complex preparation, high cost and low sensitivity of the existing flexible pressure sensor, and provides a flexible pressure sensor and its preparation method. The preparation method of the sensor is simple, low in cost, high in sensitivity and fast in response time. Short and easy to make array type sensor

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0026] Examples will be described in detail.

[0027] A flexible pressure sensor comprising an upper electrode, a lower electrode and a dielectric layer, the upper electrode and the lower electrode are multi-scale electrodes in which gold nanorods are embedded in PDMS, and the dielectric layer is a porous elastic material formed by polyurethane and deionized water body film.

[0028] Further, the thickness of the multi-scale electrode in which the gold nanorods are embedded in PDMS is 10 μm to 30 μm.

[0029] Further, the mold used in the multi-scale electrode with gold nanorods embedded in PDMS is a buckle structure formed spontaneously from the ultraviolet-treated prepolymer PDMS.

[0030] Further, the weight ratio of deionized water to polyurethane is 3:10.

[0031] A method for preparing a flexible pressure sensor, comprising the following steps:

[0032] The first step: preparation of the upper electrode and the lower electrode;

[0033] S1: Stretch the mold PDMS to 3...

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Abstract

The invention provides a flexible pressure sensor and a preparation method thereof. The flexible pressure sensor comprises an upper electrode, a lower electrode and a dielectric layer. The upper electrode and the lower electrode are multi-scale electrodes which are obtained through embedding gold nanorods into PDMS. The electric layer is a porous elastomer film which is formed by polyurethane and deionized water. The flexible pressure sensor and the preparation method thereof have advantages of wide pressure measurement range, great sensitivity improvement at a low-pressure state, simple mold preparation and low cost.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a flexible pressure sensor and a preparation method thereof. Background technique [0002] Detecting human physiological information is an important indicator for disease diagnosis and health assessment, while traditional medical devices are rigid pressure sensors, which are not easy to wear and carry. In recent years, with the development of microelectronics technology and new material preparation process, more and more flexible pressure sensors have been applied to electronic skin, wearable electronic devices and other fields. However, the preparation method of flexible pressure sensors is relatively complicated, high cost, low sensitivity and the fabrication of sensor arrays is also a challenge. Contents of the invention [0003] What the present invention is to solve is the technical problem of complex preparation, high cost and low sensitivity of the existing ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/142G01L9/12
Inventor 刘国栋郑娜肖国辉
Owner 芜湖芯硅智电子科技有限公司