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Method and device for measuring mechanical parameters of double-layer double-clamped beam

A technology of mechanical parameters and measurement methods, which is applied to the measurement of mechanical parameters of double-end fixed beams and the field of mechanical parameter measurement of double-layer double-ended fixed beams. It can solve problems such as large test errors and achieve good application prospects.

Inactive Publication Date: 2017-08-01
SOUTHEAST UNIV
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Problems solved by technology

However, in the actual production and processing process, it is difficult to ensure that the upper and lower layers of the double-layer double-end fixed-support beams are of equal width, and the measurement data of the double-layer double-end fixed-support beams with unequal widths on the upper and lower floors do not conform to the double-layer double-end fixed-support beams of equal width. The setting conditions of the pull-in voltage analytical model of double-end fixed-supported beams will inevitably bring about large test errors

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  • Method and device for measuring mechanical parameters of double-layer double-clamped beam

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Embodiment Construction

[0031] In order to facilitate the public's understanding, firstly, a brief introduction is given to the construction process of the pull-in voltage analytical model of the double-layer double-ended fixed-supported beam in the technical solution of the present invention:

[0032] suppose represent the equivalent Young’s modulus of the upper and lower layers of double-layer double-end fixed beams with unequal widths, respectively, represent the equivalent residual stresses of the upper and lower floors of double-layer double-end fixed-supported beams with unequal widths, respectively, w 1 、w 2Respectively represent the width of the upper and lower floors of the unequal-width double-layer fixed-end beam, l is the length of the unequal-width double-layer double-end fixed beam, h is the single-layer thickness of the unequal-width double-layer double-end fixed beam.

[0033] For double-layer double-end fixed-support beams, when the width and thickness of the film satisfy b i i ...

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Abstract

The invention discloses a method for measuring the mechanical parameters of a double-layer double-clamped beam, which belongs to the technical field of micro-electro-mechanical system (MEMS) material parameter online test. According to the method, based on a pull-in voltage analysis model of upper and lower unequal-width double-layer double-clamped beams, numerical calculation is carried out by using pull-in voltage of a group of upper and lower unequal-width double-layer double-clamped beams, equivalent Young's modulus of each layer and equivalent residual stress data of each layer can be obtained more accurately at one time, which is of great significance for the production and research of MEMS. The invention also discloses a mechanical parameter measuring device for double-layer double-clamped beam.

Description

technical field [0001] The invention relates to a method for measuring mechanical parameters of a double-end fixed-support beam, in particular to a method and device for measuring the mechanical parameters of a double-layer double-end fixed-support beam, belonging to a micro-electro-mechanical system (Micro-Electro-Mechanical System, referred to as MEMS) Material parameter online testing technical field. Background technique [0002] With the development and improvement of MEMS technology, various micro-mechanical components, such as micro-cantilever beams and micro-bridges, have been made with surface micro-machining technology and silicon processing technology. These micro-mechanical components, due to their small size, are often regarded as thin-film structures macroscopically, and their mechanical behavior is quite different from that of macroscopic bulk mechanical materials. The mechanical parameters of macroscopic mechanical materials that we are familiar with cannot b...

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Application Information

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IPC IPC(8): G01N3/00
CPCG01N3/00
Inventor 郭欣格周再发黄庆安
Owner SOUTHEAST UNIV
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