On-line test structure and test method for breaking strength of polycrystalline silicon
A technology for breaking strength and online testing, applied in the direction of material resistance, can solve problems such as poor stability and low precision, and achieve the effects of reliable output results, low testing equipment requirements, and simple testing methods.
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[0035] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.
[0036] Such as Figure 3-5 As shown, the test structure of this embodiment includes a first test unit, a second test unit, a third test unit and an insulating substrate, and the first test unit, the second test unit and the third test unit are arranged on the insulating substrate superior;
[0037] The first test unit includes a first pair of fixed anchor regions C-C, a first independent anchor region D, a first polysilicon contact block 101, a first polysilicon pointer 102 and a first polysilicon expansion strip 103, wherein: the first The fixed anchor region C-C and the first independent anchor region D are re...
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