On-line test structure and test method for breaking strength of polycrystalline silicon

A technology for breaking strength and online testing, applied in the direction of material resistance, can solve problems such as poor stability and low precision, and achieve the effects of reliable output results, low testing equipment requirements, and simple testing methods.

Inactive Publication Date: 2014-03-12
SOUTHEAST UNIV
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Problems solved by technology

However, to quantitatively calculate the thermal expansion of a material needs to know the thermal expansion coefficient of the material, and the specific value of the thermal expansion coefficient is also related to the manufacturing process. Therefore, it is first necessary to test the thermal expansion coefficient of the material online, but most of the existing online measurement methods There are problems of low precision and poor stability

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  • On-line test structure and test method for breaking strength of polycrystalline silicon
  • On-line test structure and test method for breaking strength of polycrystalline silicon
  • On-line test structure and test method for breaking strength of polycrystalline silicon

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Embodiment Construction

[0035] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.

[0036] Such as Figure 3-5 As shown, the test structure of this embodiment includes a first test unit, a second test unit, a third test unit and an insulating substrate, and the first test unit, the second test unit and the third test unit are arranged on the insulating substrate superior;

[0037] The first test unit includes a first pair of fixed anchor regions C-C, a first independent anchor region D, a first polysilicon contact block 101, a first polysilicon pointer 102 and a first polysilicon expansion strip 103, wherein: the first The fixed anchor region C-C and the first independent anchor region D are re...

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Abstract

The invention discloses an on-line test structure and an on-line test method for breaking strength of polycrystalline silicon. The method comprises the following steps of: performing simple current excitation on a test structure, measuring related resistance, substituting a related resistance value obtained through measurement into a calculation formula, and eliminating a thermal expansion coefficient by using a plurality of calculation equations to obtain the breaking strength of the polycrystalline silicon finally. The test method is simple, test equipment has low requirements, the machining process of the test structure is synchronous with a micro-electromechanical system (MEMS), special processing requirements are avoided, the requirement of on-line test is met, simple mathematical equations are adopted for calculation, test and calculation processes are stable, and output results are reliable.

Description

technical field [0001] The invention relates to an on-line testing technology for micro-electro-mechanical system material parameters, in particular to an on-line testing structure and testing method for polysilicon fracture strength. Background technique [0002] The performance of micro-electromechanical devices MEMS is closely related to the physical parameters of materials, and the physical parameters of materials for manufacturing micro-electromechanical devices are related to the manufacturing process, that is, the physical parameters of materials will also be different in different manufacturing processes. [0003] Polysilicon is an important and basic material for fabricating microelectromechanical device structures, and is usually produced by chemical vapor deposition (CVD). The fracture strength of polysilicon is an important physical parameter of the material. The fracture strength of polysilicon can be tested offline by special instruments by making test samples,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/04
Inventor 李伟华张卫青周再发刘海韵蒋明霞
Owner SOUTHEAST UNIV
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