Resonant frequency based composite cantilever beam mechanical parameter measurement method and device

A composite cantilever beam and resonant frequency technology, which is applied in the field of composite cantilever beam mechanical parameter measurement and composite cantilever beam mechanical parameter measurement based on resonant frequency, can solve the problem that the mechanical parameters of single-layer film materials cannot be directly applied to multi-layer films, etc. The effect of solving the problem of mechanical parameter measurement, low test equipment requirements, and stable test process

Inactive Publication Date: 2017-10-13
SOUTHEAST UNIV
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Problems solved by technology

This invention is mainly applicable to single-layer films, but the current market demand for multi-layer film material parameters is increasing, and the extraction of mechanical parameters of single-layer film materials cannot be directly applied to multi-layer films

Method used

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  • Resonant frequency based composite cantilever beam mechanical parameter measurement method and device
  • Resonant frequency based composite cantilever beam mechanical parameter measurement method and device
  • Resonant frequency based composite cantilever beam mechanical parameter measurement method and device

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Embodiment Construction

[0028] Aiming at the online measurement of the mechanical parameters of the multilayer composite thin film structure, the idea of ​​the present invention is to obtain the relationship between the first-order resonance frequency of the multilayer composite cantilever and parameters such as material properties and structural dimensions by constructing a resonance model of the multilayer composite cantilever beam. relationship, and use the form of solving equations to obtain the equivalent Young's modulus of each layer of the multi-layer composite cantilever beam at one time.

[0029] In order to facilitate the public's understanding of the technical solution of the present invention, the theoretical principles of the technical solution of the present invention are first described in detail.

[0030] For a multilayer composite cantilever beam composed of at least two film structures, when the film width and thickness satisfy w i i , that is, when the cantilever beam is a narrow b...

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Abstract

The invention discloses a resonant frequency based composite cantilever beam mechanical parameter measurement method. The method is based on the relationship between first-order resonant frequency of a multilayer composite double-end cantilever beam, material properties, structure size and other parameters, and utilizes the form of solving equations to acquire an equivalent Young's modulus of each layer in the multilayer composite cantilever beam at one time. The invention also discloses a resonant frequency based composite cantilever beam mechanical parameter measurement device. The method and device provided by the invention can satisfy on-line testing of the multilayer composite cantilever beam's Young's modulus, and have the characteristics of simple testing structure and calculation method, and higher accuracy.

Description

technical field [0001] The invention relates to a method for measuring the mechanical parameters of a composite cantilever beam, in particular to a method for measuring the mechanical parameters of a composite cantilever beam based on a resonant frequency, and belongs to the technical field of on-line testing of material parameters of a micro-electro-mechanical system (Micro-Electro-Mechanical System, referred to as MEMS) . Background technique [0002] The full name of MEMS is micro-electro-mechanical system, also known as micro-electro-mechanical system, micro-system, micro-machine, etc. It refers to a high-tech device with a size of a few millimeters or less. smart system. MEMS is mainly composed of three parts: sensors, actuators (actuators) and micro energy sources. MEMS involves various disciplines and engineering technologies such as physics, semiconductors, optics, electronic engineering, chemistry, materials engineering, mechanical engineering, medicine, informati...

Claims

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Application Information

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IPC IPC(8): G01N3/00B81B7/02
CPCB81B7/02G01N3/00G01N2203/0282
Inventor 郭欣格周再发黄庆安
Owner SOUTHEAST UNIV
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