A three-axis capacitive accelerometer and electronic device
An accelerometer, capacitive technology, applied in the direction of measurement of acceleration, velocity/acceleration/impact measurement, measurement device, etc., can solve the problems of large occupied area and weight of the mass block, which is not conducive to the trend of light and thin triaxial capacitive accelerometers, etc. Achieve the effect of favoring the trend of thinning, reducing the number, and reducing the zero point deviation and sensitivity deviation
Active Publication Date: 2022-06-24
SENODIA TECH (SHANGHAI) CO LTD
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However, the existing three-axis capacitive accelerometers are generally provided with different mass blocks for the capacitive detection areas in different axial directions, and the mass blocks occupy a large area and weight, which is not conducive to the thinness of the three-axis capacitive accelerometer. trend
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[0042]The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0043] As described in the background art, capacitive accelerometers have become the most popular type of accelerometers because of their simple structure, low cost, and advantages such as high sensitivity and linearity in the low frequency range. However, the existing triaxial capacitive accelerometers generally set different mass blocks for the capacitance detection areas of different axial directions, and the occupied area and weight...
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The invention discloses a three-axis capacitive accelerometer and an electronic device, comprising: a first mass block and a second mass block arranged symmetrically, the first mass block and the second mass block are connected through an elastic structure coupling, and The mass block is movably arranged on the base through at least one fixed anchor point corresponding to it, and is used to generate a motion corresponding to the acceleration when an acceleration is applied to the three-axis capacitive accelerometer; Multiple detection areas, any detection area includes a detection capacitor composed of a fixed structure and a movable structure, and the mass blocks are multiplexed with a movable structure, and the fixed structure is fixed on the substrate, which is used to apply a three-axis capacitive accelerometer When accelerating, a specific capacitance value change with the acceleration occurs. The technical solution provided by the invention is beneficial to the thinning trend of the three-axis capacitive accelerometer, and effectively reduces the zero point deviation and the sensitivity deviation of the accelerometer.
Description
technical field [0001] The invention relates to the technical field of triaxial capacitive accelerometers, and more particularly, to a triaxial capacitive accelerometer and an electronic device. Background technique [0002] Micro-accelerometers based on Micro-Electro-Mechanical-System (MEMS, Micro-Electro-Mechanical-System) have been widely used in industry, medical, civil, military, etc. due to their small size, low cost, good integration, and excellent performance. more and more applications in the field. At present, it has become a standard configuration to a certain extent in the application of various mobile terminals, cameras, game controllers, navigators and other products. In the development process, capacitive, resistive and piezoelectric detection methods are the main application mechanisms. Among them, capacitive accelerometers have a simple structure, low cost, and high sensitivity in the low frequency range. and linearity and other advantages, it has become t...
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IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 邹波王辉刘爽
Owner SENODIA TECH (SHANGHAI) CO LTD