Triaxial capacitive accelerometer

Abstract

The invention discloses a triaxial capacitive accelerometer. The direction of acceleration in the i-axis direction can be determined through the positions of first-type detection regions and second-type detection regions. The total variation of the capacitance values, which vary according to the input of the acceleration of a mass along the m-axis or the n-axis, of the i-axis capacitance detectionelectrodes of all first-type detection regions is the same as the total variation of the capacitance values, which vary according to the input of the acceleration of the mass along the m-axis or then-axis, of the i-axis capacitance detection electrodes of all second-type detection regions. The difference between the sum of the capacitance values of the i-axis capacitance detection electrodes ofall first-type detection regions and the capacitance values of the i-axis capacitance detection electrodes of all second-type detection regions is acquired. The influence of the input of the acceleration of the mass along the m-axis or the n-axis on the acceleration in the i-axis direction is eliminated. The value of the acceleration in the i-axis direction can be acquired by deriving the difference. Sharing one mass is beneficial to the lighter and thinner trend of the triaxial capacitive accelerometer.

Description

technical field [0001] The invention relates to the technical field of sensors, and more specifically, relates to a three-axis capacitive accelerometer. Background technique [0002] Micro-accelerometers based on micro-electro-mechanical systems (MEMS, Micro-Electro-Mechanical-System) have been widely used in industry, medical, civilian, military, etc. due to their small size, low cost, good integration, and excellent performance. fields have been increasingly applied. At present, in the application of various mobile terminals, cameras, game controllers, navigators and other products, to a certain extent, it has become a standard configuration. In the development process, capacitive, resistive, and piezoelectric methods are the main application mechanisms for detecting acceleration. Among them, capacitive accelerometers are simple in structure, low in cost, and have high sensitivity in the low frequency range. And linearity and other advantages, become the most popular typ...

AI Technical Summary

Problems solved by technology

However, the existing three-axis capacitive accelerometers generally include a plurality of mass blocks to correspond to the detection areas of different axes respectively, and the occupied area and weight of the mass blocks are large, which is not conducive to the three-axis capacitive accelerometer. thinning trend

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