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Molybdenum disulfide doped nano-silver particle composite humidity sensor and preparation method thereof

A nano-silver particle and humidity sensor technology, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of low response sensitivity, long response time and recovery time, humidity sensor sensitivity and response speed are difficult to further improve, and achieve high Response sensitivity, fast response speed, effect of increasing specific surface area

Active Publication Date: 2020-01-17
SOUTHWEST JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Humidity sensors are widely used in various fields, but there are still some problems, such as low response sensitivity, long response time and recovery time, etc.
[0003] In 2013, Yinghua Tan proposed a capacitive relative humidity sensor based on pure molybdenum disulfide in the article The combinations of hollow MoS2 micro@nanospheres: one-step synthesis, excellent photocatalytic and humidity sensing properties. The double-comb-like interdigitated structure applies molybdenum disulfide dispersion droplets to the electrode area. This humidity sensor uses molybdenum disulfide as the sensitive material. Thanks to the large specific surface area of ​​molybdenum disulfide, this sensor is compared with the previous ones based on Humidity sensors made of traditional materials such as polyimide, lithium chloride, and oxide ceramic materials have high humidity response sensitivity, but there are only tens of picofarads per relative humidity response change, and the response time of the sensor is within one hundred More than seconds, limited by the characteristics of the molybdenum disulfide material itself, the sensitivity and response speed of this humidity sensor are difficult to further improve

Method used

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  • Molybdenum disulfide doped nano-silver particle composite humidity sensor and preparation method thereof
  • Molybdenum disulfide doped nano-silver particle composite humidity sensor and preparation method thereof
  • Molybdenum disulfide doped nano-silver particle composite humidity sensor and preparation method thereof

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Effect test

Embodiment 1

[0027] A method for preparing a molybdenum disulfide-doped nano-silver particle composite humidity sensor, comprising the following steps:

[0028] (1) the nano-silver particles with a particle diameter less than or equal to 100 nanometers are mixed into water to form a concentration of 0.1 mg / ml of nano-silver particle water dispersion, and the nano-silver particle water dispersion is mixed with a concentration of 0.1 mg / ml In the molybdenum disulfide aqueous dispersion, the volume ratios of the molybdenum disulfide aqueous dispersion and the nano-silver particle aqueous dispersion are respectively 5:1, 10:1, 15:1, and 20:1, and 4 samples are obtained. Ultrasonic dispersion for 2 hours to obtain a molybdenum disulfide-doped nano-silver particle composite material dispersion;

[0029] (2) Clean the silicon substrate, form a layer of silicon dioxide on the surface of the silicon substrate by a thermal oxidation method, and then form a first electrode and a second electrode on t...

Embodiment 2

[0038] A method for preparing a molybdenum disulfide-doped nano-silver particle composite humidity sensor, comprising the following steps:

[0039] (1) the nano-silver particles with a particle diameter less than or equal to 100 nanometers are mixed into water to form a concentration of 4.0 mg / ml of nano-silver particle water dispersion, and the nano-silver particle water dispersion is mixed with a concentration of 4.0 mg / ml In the molybdenum disulfide aqueous dispersion, the volume ratios of the molybdenum disulfide aqueous dispersion and the nano-silver particle aqueous dispersion are respectively 5:1, 10:1, 15:1, and 20:1, and 4 samples are obtained. Ultrasonic dispersion for 24 hours to obtain a molybdenum disulfide-doped nano-silver particle composite material dispersion;

[0040] (2) Clean the silicon substrate, form a layer of silicon dioxide on the surface of the silicon substrate by a thermal oxidation method, and then form a first electrode and a second electrode on ...

Embodiment 3

[0049] A method for preparing a molybdenum disulfide-doped nano-silver particle composite humidity sensor, comprising the following steps:

[0050] (1) the nano-silver particles with a particle diameter less than or equal to 100 nanometers are mixed into water to form a concentration of 2 mg / ml of nano-silver particle water dispersion, and the nano-silver particle water dispersion is mixed with a concentration of 2 mg / ml In the molybdenum disulfide aqueous dispersion, the volume ratios of the molybdenum disulfide aqueous dispersion and the nano-silver particle aqueous dispersion are respectively 5:1, 10:1, 15:1, and 20:1, and 4 samples are obtained. Ultrasonic dispersion for 13 hours to obtain a molybdenum disulfide-doped nano-silver particle composite material dispersion;

[0051] (2) Clean the silicon substrate, form a layer of silicon dioxide on the surface of the silicon substrate by a thermal oxidation method, and then form a first electrode and a second electrode on the ...

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Abstract

The invention provides a molybdenum disulfide-doped nano-silver particle composite humidity sensor and a preparation method thereof, comprising the steps of: forming a nano-silver particle water dispersion, mixing the nano-silver particle water dispersion into the molybdenum disulfide water dispersion, and ultrasonically Disperse to obtain molybdenum disulfide-doped nano-silver particle composite material dispersion liquid; form a layer of silicon dioxide layer on the surface of the silicon substrate, then form the first electrode and the second electrode on the surface of the silicon dioxide layer, obtain the electrode substrate, obtain The obtained molybdenum disulfide-doped nano-silver particle composite material dispersion is attached to the surface of the electrode substrate, placed in a protective gas and left to dry, thereby obtaining an electrode with a molybdenum disulfide-doped nano-silver particle composite material film Substrate; the humidity sensor of the present invention has higher response sensitivity and faster response speed.

Description

technical field [0001] The invention relates to the field of sensor manufacturing, in particular to a molybdenum disulfide-doped nano-silver particle composite humidity sensor with the characteristics of ultra-high sensitivity and fast response speed and a preparation method thereof. Background technique [0002] Humidity sensors are widely used in various fields, but there are still some problems, such as low response sensitivity, long response time and recovery time, etc. [0003] In 2013, Yinghua Tan proposed a capacitive relative humidity sensor based on pure molybdenum disulfide in the article The combinations of hollow MoS2 micro@nanospheres: one-step synthesis, excellent photocatalytic and humidity sensing properties. The double-comb-like interdigitated structure applies molybdenum disulfide dispersion droplets to the electrode area. This humidity sensor uses molybdenum disulfide as the sensitive material. Thanks to the large specific surface area of ​​molybdenum disu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/22
CPCG01N27/223
Inventor 陈向东李宁
Owner SOUTHWEST JIAOTONG UNIV
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