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Chuck table mechanism

A chuck worktable and worktable technology, which is applied to work accessories, fine work devices, manufacturing tools, etc., can solve the problems of inability to replace sealing rings, cumbersome sealing ring replacement operations, and long-term maintenance, so as to shorten maintenance. effect of time

Active Publication Date: 2020-06-19
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, unless the movable shaft of the chuck table is removed from the fixed shaft, the seal ring cannot be replaced, and there is a problem that replacement of the seal ring is cumbersome and requires long-term maintenance.

Method used

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  • Chuck table mechanism
  • Chuck table mechanism
  • Chuck table mechanism

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0015] Hereinafter, a cutting device having the chuck table mechanism of the present embodiment will be described with reference to the drawings. figure 1 It is a perspective view of the cutting device of this embodiment. figure 2 is a schematic cross-sectional view of a chuck table mechanism of a comparative example. In addition, in the following description, although the structure which has a chuck table mechanism in a cutting apparatus is illustrated and demonstrated, it is not limited to this structure. For example, other processing devices such as a laser processing device or a grinding device may have a chuck table mechanism.

[0016] Such as figure 1 As shown, the cutting device 1 is configured to cut the disc-shaped workpiece W on the chuck table 51 with the cutting tool 46 and divide it into individual device chips. The workpiece W is a rectangular package substrate, the front surface of the substrate is divided by grid-like partitions, and various devices are for...

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PUM

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Abstract

Provides a chuck table mechanism that simplifies the replacement work of seal rings and shortens maintenance time. The chuck table mechanism (50) has: a chuck table (51), which attracts and holds the workpiece (W); a rotating part (81), which has a table mounting surface (82); a cylindrical The fixed shaft (71) is arranged at the rotation center of the chuck table; and the rotation motor (94) rotates the rotating part around the fixed shaft. A ring-shaped sealing plate (91) covering the upper end of the fixed shaft is installed on the rotating part in a detachable manner, and an annular groove (73) for installing the sealing ring (75) is formed on the upper end of the fixed shaft . By attaching the seal plate to the rotating part to seal the gap between the seal plate and the fixed shaft, air leakage in the fixed shaft is suppressed, and the replacement of the seal ring is simplified by removing the seal plate from the rotating part.

Description

technical field [0001] The present invention relates to a chuck table mechanism for holding a workpiece in a processing device. Background technique [0002] The front surface of a workpiece such as a semiconductor wafer is divided into a plurality of regions by grid-like partitions, and devices such as ICs and LSIs are formed in the divided regions. In the device manufacturing process, individual device chips are formed by cutting the workpiece along the lanes. The division of the workpiece is performed by a processing device such as a cutting device or a laser processing device. Each processing device is provided with a chuck table mechanism for sucking and holding a workpiece. In the chuck table mechanism, the chuck table is rotatably and attractably attached to a fixed shaft via a rotational connection (for example, refer to Patent Document 1). [0003] Patent Document 1: Japanese Unexamined Patent Publication No. 2010-089234 [0004] In the rotary connection of the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B28D5/00B28D7/04H01L21/683
CPCH01L21/6838B28D5/0094H01L21/68721H01L21/6835H01L21/68764H01L21/68792
Inventor 植山博光
Owner DISCO CORP