Packaging structure, packaging method for OLED display device, and display device
A technology for display devices and packaging methods, applied in semiconductor devices, electric solid-state devices, organic light-emitting devices, etc., can solve the problems affecting the service life of OLED display devices, residual particles on the mask plate, etc., so as to reduce the mask plate alignment process, avoid Process assurance, the effect of saving packaging costs
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[0032] In order to further illustrate the encapsulation structure, encapsulation method, and display device of the OLED display device provided by the embodiments of the present invention, a detailed description will be given below in conjunction with the accompanying drawings.
[0033] As mentioned in the background technology, the traditional encapsulation process needs to use a mask board to cover the OLED display device to be encapsulated, and then use CVD technology or ALD technology to deposit an encapsulation film on the encapsulation area on the OLED display device to be encapsulated, so as to realize the OLED display device. package. CVD technology is a process technology that passes one or several compounds containing thin film elements and elemental gas into a reaction chamber where a substrate is placed, and deposits a solid film on the surface of a substrate by means of a space gas phase chemical reaction; The gas-phase precursor is alternately passed into the rea...
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