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Gradual change refraction-index film preparation parameter obtaining method, preparation method and light filter

A technology of graded refractive index and parameter acquisition, which is applied in the field of thin film preparation technology and can solve problems such as unknowable

Active Publication Date: 2017-09-05
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, at present, the core technology for preparing graded-refractive-index films is still in foreign countries and cannot be known. Therefore, in order to break this monopoly, a method for preparing graded-refractive-index films is urgently needed.

Method used

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  • Gradual change refraction-index film preparation parameter obtaining method, preparation method and light filter
  • Gradual change refraction-index film preparation parameter obtaining method, preparation method and light filter
  • Gradual change refraction-index film preparation parameter obtaining method, preparation method and light filter

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no. 1 example

[0028] figure 2 A method for obtaining the preparation parameters of the graded-refractive-index film provided by the first embodiment of the present invention is shown, and the method is used to obtain the preparation parameters of the graded-refractive-index film. Gradient-refractive-index film refers to a film whose refractive index changes continuously along the normal direction of the film surface and remains constant in the direction parallel to the film surface. Rugate film is a kind of graded index film, which refers to a film whose refractive index layer changes periodically as the thickness of the film layer increases. Special optical properties can be achieved through periodic changes in the refractive index, such as the property of reflecting only a narrow spectral region while transmitting other wavelength bands. In the following embodiment, the method for obtaining the preparation parameters of the graded-refractive-index film provided in the embodiment of the ...

no. 2 example

[0075] Image 6 A block diagram of a preparation parameter acquisition device provided by the second embodiment of the present invention is shown. The preparation parameter acquisition device 200 provided in this embodiment runs on the electronic device 100 and is used to realize the method for obtaining the preparation parameter of the graded-index film provided in the first embodiment above. see Image 6 , the preparation parameter acquisition device 200 includes: a first acquisition module 210 , a second acquisition module 220 and a processing module 230 .

[0076] Wherein, the first obtaining module 210 is used to obtain the preparation data of the graded-refractive-index film to be prepared, wherein the preparation data includes the refractive index and film thickness of each layer of the graded-refractive-index film.

[0077] The second acquisition module 220 is configured to acquire a reference correspondence, the reference correspondence is the relationship between t...

no. 3 example

[0087] The third embodiment of the present invention also provides a method for preparing a graded-refractive-index film, the method comprising: using the atomic layer deposition technique, the preparation parameters obtained according to the method for obtaining the preparation parameters of the graded-refractive-index film provided in the above-mentioned first embodiment , using the precursor corresponding to the first film material and the precursor corresponding to the second film material as raw materials, sequentially deposit multiple film layers on a preset substrate to obtain a graded index film, wherein each film layer corresponds to at a refractive index. When the prepared graded-refractive-index film is a Rugate film, the refractive indices of the above-mentioned multiple film layers are periodically distributed.

[0088] Specifically, in the atomic layer deposition coating equipment, the precursor corresponding to the first film layer material and the precursor cor...

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PUM

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Abstract

The invention provides a gradual change refraction-index film preparation parameter obtaining method, a preparation method and a light filter and belongs to the technical field of film preparation processes. The preparation parameter obtaining method comprises the steps that preparation data of a gradual change refraction-index film to be prepared is obtained, wherein the preparation data includes refraction index and thickness of each film layer of the gradual change refraction-index film; a standard correspondence relation is obtained, wherein the standard correspondence relation is the relation between the refraction index of a hybrid film layer and film layer concentration; according to the standard correspondence relation and the preparation data, preparation parameters of the gradual change refraction-index film are obtained. By adopting the method, accurate obtaining of the preparation parameters of the gradual change refraction-index film to be prepared is promoted, and accordingly the gradual change refraction-index film and the light filter which meet the demands in performance are prepared.

Description

technical field [0001] The invention relates to the technical field of thin film preparation technology, in particular to a method for obtaining preparation parameters of a graded refractive index thin film, a preparation method and an optical filter. Background technique [0002] Wrinkle (Rugate) filter refers to a structure with regular periodic changes in refractive index. Through this periodic change, special optical properties can be achieved, such as having only a narrow spectral region of reflection, while passing through all other The nature of the band. This property is similar to the 1 / 4 wave pile, and there is no high order reflection band of the 1 / 4 wave pile, especially suitable for removing bright spectral lines in a weak continuous spectral background, such as laser spectral lines, so in such as laser protection, etc. There are important applications in the field. [0003] However, at present, the core technology for the preparation of graded-index films is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28
CPCG02B5/289
Inventor 卫耀伟刘浩蔡清元王震潘峰张哲刘志超吴倩罗晋欧阳升
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS