Gradient refractive index thin film preparation parameter acquisition method, preparation method and optical filter
A technology of graded index of refraction and parameter acquisition, applied in the field of thin film preparation technology, can solve problems such as inability to know
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no. 1 example
[0028] figure 2 A method for obtaining the preparation parameters of the graded-refractive-index film provided by the first embodiment of the present invention is shown, and the method is used to obtain the preparation parameters of the graded-refractive-index film. Gradient-refractive-index film refers to a film whose refractive index changes continuously along the normal direction of the film surface and remains constant in the direction parallel to the film surface. Rugate film is a kind of graded index film, which refers to a film whose refractive index layer changes periodically as the thickness of the film layer increases. Special optical properties can be achieved through periodic changes in the refractive index, such as the property of reflecting only a narrow spectral region while transmitting other wavelength bands. In the following embodiment, the method for obtaining the preparation parameters of the graded-refractive-index film provided in the embodiment of the ...
no. 2 example
[0075] Image 6 A block diagram of a preparation parameter acquisition device provided by the second embodiment of the present invention is shown. The preparation parameter acquisition device 200 provided in this embodiment runs on the electronic device 100 and is used to realize the method for obtaining the preparation parameter of the graded-index film provided in the first embodiment above. see Image 6 , the preparation parameter acquisition device 200 includes: a first acquisition module 210 , a second acquisition module 220 and a processing module 230 .
[0076] Wherein, the first obtaining module 210 is used to obtain the preparation data of the graded-refractive-index film to be prepared, wherein the preparation data includes the refractive index and film thickness of each layer of the graded-refractive-index film.
[0077] The second acquisition module 220 is configured to acquire a reference correspondence, the reference correspondence is the relationship between t...
no. 3 example
[0087] The third embodiment of the present invention also provides a method for preparing a graded-refractive-index film, the method comprising: using the atomic layer deposition technique, the preparation parameters obtained according to the method for obtaining the preparation parameters of the graded-refractive-index film provided in the above-mentioned first embodiment , using the precursor corresponding to the first film material and the precursor corresponding to the second film material as raw materials, sequentially deposit multiple film layers on a preset substrate to obtain a graded index film, wherein each film layer corresponds to at a refractive index. When the prepared graded-refractive-index film is a Rugate film, the refractive indices of the above-mentioned multiple film layers are periodically distributed.
[0088] Specifically, in the atomic layer deposition coating equipment, the precursor corresponding to the first film layer material and the precursor cor...
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