Two-way valveless microflow pump based on PVDF piezoelectric film and preparation method thereof
A piezoelectric film and micro-flow pump technology, which is applied to pumps, pumps, mechanical equipment, etc. To solve problems such as two-way drive, to achieve the effect of improving product cost performance, solving short service life and easy realization
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[0026] The present invention is described in further detail below in conjunction with accompanying drawing:
[0027] refer to figure 1 , the two-way valveless microflow pump based on PVDF piezoelectric film of the present invention includes a cover plate 1, a PVDF piezoelectric film 2, a channel layer 3 and a substrate 4 fixedly connected in sequence from top to bottom, wherein the PVDF piezoelectric film The upper surface and the lower surface of 2 are provided with a number of conductive film areas, each conductive film area includes a working area electrode 5 and a conduction area electrode 6 for connecting the working area electrode 5 with an external voltage source, and the PVDF piezoelectric A working area electrode 5 on the upper surface of the film 2 is facing a working area electrode 5 on the lower surface of the PVDF piezoelectric film 2, a through hole 7 is opened on the cover plate 1, and a fluid channel 8 and two fluid channels are opened on the channel layer 3. ...
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