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Method for measuring micro displacement via CCD based on principle of single slit diffraction

A micro-displacement, single-slit diffraction technology, applied in the field of distance measurement, can solve the problems of complex measurement operation and low measurement accuracy, and achieve the effects of high measurement accuracy, unique structure and simple operation steps.

Inactive Publication Date: 2017-09-22
UNIV OF JINAN
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Problems solved by technology

The traditional displacement measurement methods, whether non-optical or optical, have the disadvantages of low measurement accuracy or complicated measurement operations.

Method used

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Embodiment Construction

[0042] The present invention will be further described below.

[0043] A method for measuring tiny displacements using a CCD based on the principle of single-slit diffraction, comprising the following steps:

[0044] a) Two laser light sources with the same wavelength, the light paths of the two light sources are parallel, and the light emitted by one of the laser light sources passes through the calibration slit to produce Lang-Hofer diffraction, and the light emitted by the other laser light source passes through the variable slit Langhefei diffraction occurs after the slit, and the two diffracted light paths pass through the convex lens and focus on the back focal plane of the convex lens to form two diffraction images. When the moving object is displaced, the slit width of the variable slit changes accordingly;

[0045] b) Before the slight displacement of the moving object, the CCD camera records and converts the two diffraction images into digital information and saves t...

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Abstract

The invention relates to a method for measuring the micro displacement via a CCD based on the principle of single slit diffraction. Two single slits in parallel, namely a calibrating slit whose width is known and a measuring slit whose width is variable, carry out diffraction, different diffraction images obtained by the two slits are gathered to a focal plane of a lens via a convex lens, and the CCD implements collection. The images are transmitted to software for further analysis and calculation, and change of the slit width, namely the micro displacement, is calculated. Operation is convenient, automatic measurement is realized, a diffraction system is used to measure the displacement in high measuring precision, and the micro displacement is measured in an automatic, intelligent and high-precision way.

Description

technical field [0001] The invention relates to the field of distance measurement, in particular to a method for measuring tiny displacements by using CCD image processing. Background technique [0002] At this stage, with the development of micro-displacement measurement technology at home and abroad, the measurement distance becomes smaller and smaller, so the measurement of micro-displacement becomes more and more important. The tools for measuring small displacements have also become intelligent and automated, and the measurement accuracy is very high. The dynamic range of measurement has also developed to a wider field, and the measurement dimensions are also changing, from one-dimensional to two-dimensional to multi-dimensional measurement fields. develop. In recent years, many methods for measuring small displacements have been produced, such as optical, electromagnetic, mechanical and many other methods, but they can be roughly divided into two categories, one is no...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 黄继阳赵相斌尹秀
Owner UNIV OF JINAN
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