Transport apparatus, apparatus for handling an article and transport method

A technology for items, processing stations, applied in the direction of conveyor items, transportation and packaging, conveyors, etc., which can solve problems such as low wear resistance, limited function, increased cost and process, etc.

Active Publication Date: 2017-10-13
SINGULUS TECHNOLGIES AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, compaction by means of sponge rollers has disadvantages due to rapidly changing material properties
Further, sponge rollers have low wear resistance, which ultimately leads to increased cost and process uncertainty, respectively
[0005] Compression systems using process fluid pressure in chemical processes p

Method used

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  • Transport apparatus, apparatus for handling an article and transport method
  • Transport apparatus, apparatus for handling an article and transport method
  • Transport apparatus, apparatus for handling an article and transport method

Examples

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Embodiment Construction

[0026] Embodiments of the invention relate to apparatus and methods for transporting and / or handling items, especially substrates such as silicon sheets, glass or foils. The invention relates to devices and methods for transporting and / or handling objects, especially thin substrates, such as silicon wafers, glass or foils. Such silicon flakes can, for example, have a thickness of less than 130 to 140 μm. However, embodiments of the invention can also be used for transporting or handling other items or articles, such as plate-shaped bodies. A plate-shaped body can here mean a body whose length and width are significantly greater than its thickness, for example 100 or 200 times greater. Thus, the length and width of said plate-shaped body define two substantially mutually parallel opposing main surfaces, said main surfaces representing the largest area of ​​said plate-shaped body, having an area significantly larger than that connected to said main surfaces any side surface. ...

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PUM

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Abstract

A transport apparatus has a transport device which is designed to support transport along a transport path of an article to be transported, wherein the article to be transported is a semiconductor wafer, a glass panel or a polymer sheet, and at least one flexible roller for holding the article to be transported against the transport device. The flexible roller has a hub and a roll-off ring which is mounted on the hub in a flexible manner by way of a plurality of spokes distributed around the circumference of the hub. Each of the spokes has a first segment, which is attached to the hub, a second segment, which is attached to the roll-off ring, and a third segment between the first segment and the second segment, which is at a greater inclination with respect to the radial direction than the first and the second segment.

Description

technical field [0001] The invention relates to a transport mechanism, a mechanism for handling objects, including such a transport mechanism and a transport method. Background technique [0002] Transport equipment is often required to transport items and to process items through factories such as processing plants. Different transport devices are already known here. US 4,089,339 shows, for example, a device for cleaning workpieces which are transported by means of a belt drive. From US 2003 / 0194309 A1 a transport device is known which comprises transport rollers and pressure rollers which press plate-shaped objects against the transport rollers. WO 2010 / 009865 A1 also discloses a transport device that can be provided with a pressing device or that wetting from the top can take place so that a mechanical pressing device can be dispensed with. [0003] During the linear transport of light, thin, sensitive rigid or flexible substrates through the dipping, spraying, floodin...

Claims

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Application Information

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IPC IPC(8): B65G37/00B65G39/06
CPCB65G39/06B65G37/005B65G2201/022
Inventor 克劳斯·赫苛赫兹
Owner SINGULUS TECHNOLGIES AG
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