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Computer-aided alignment method based on interference measurement and sensitivity matrix

A sensitivity matrix, computer-aided technology, applied in measurement devices, calculations, optical instrument testing, etc., can solve problems such as a large number of calculations and large differences in sensitivity matrices, and achieve the effect of weakening influence, reducing workload and difficulty, and reducing dependence.

Active Publication Date: 2017-10-20
NANJING UNIV OF SCI & TECH
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Problems solved by technology

The advantage of these methods is that the sensitivity matrix is ​​calculated before installation and adjustment, but the disadvantage is that a large amount of calculation is required, and the calculated sensitivity matrix is ​​quite different from the actual sensitivity matrix

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  • Computer-aided alignment method based on interference measurement and sensitivity matrix
  • Computer-aided alignment method based on interference measurement and sensitivity matrix
  • Computer-aided alignment method based on interference measurement and sensitivity matrix

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Embodiment Construction

[0047] The scheme of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0048] Such as figure 1 As shown, the computer-aided adjustment method based on interferometry and sensitivity matrix includes the following steps:

[0049] Step 1, coarse adjustment:

[0050] Adjust the entire interferometric system to the initial measurement position, fix the aspheric surface to be measured on the four-dimensional adjustment frame, and adjust the four-dimensional adjustment frame until the concentric circular interference fringes appear in the image acquisition window of the interferometer. At this time, the rough adjustment is considered to be completed;

[0051] Wherein, the initial position refers to the position where the distance between the center of the aspheric surface to be tested and the center of the standard spherical mirror is the sum of the radii of curvature of the two.

[0052] The aspherical p...

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Abstract

The invention discloses a computer-aided alignment method based on interference measurement and a sensitivity matrix; the method comprises the following steps: scanning each preset position in an optical axis direction of a tested member in the process; using a high precision displacement device to enable four misalignments of the tested member to have known variations; associating the variations with a phase position Zernike coefficient measured by an interferometer; building the sensitivity matrix of the position; using the measured phase position to calculate element misalignments, and aligning the interferometer according to the misalignments. The method can reduce the misalignment influences on calculations when an ideal model cannot comply with reality, thus effectively reducing workloads.

Description

technical field [0001] The invention belongs to the field of computer-aided adjustment, and in particular relates to a computer-aided adjustment method based on interference measurement and sensitivity matrix. Background technique [0002] In modern optical research, aspheric elements have the functions of correcting aberrations, improving image quality, expanding the field of view and simplifying the optical path, etc., and are widely used. Compared with measurement methods such as profilometry, the detection of aspheric surfaces by interferometric methods has higher accuracy, but the requirements for the installation and adjustment of interferometers are also high. [0003] Traditional assembly and adjustment mainly rely on manual work, which has a large accuracy deviation and is not stable enough. Computer-aided adjustment technology is an automatic adjustment technology that has emerged in recent years. In the context of the optical field, it is combined with optical in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02G06F17/16G06F17/50
CPCG01M11/0292G06F17/16G06F30/20
Inventor 马俊石磊高志山朱日宏李建欣谢建康苗新宇魏聪张天宇
Owner NANJING UNIV OF SCI & TECH
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