Computer-aided alignment method based on interference measurement and sensitivity matrix
A sensitivity matrix, computer-aided technology, applied in measurement devices, calculations, optical instrument testing, etc., can solve problems such as a large number of calculations and large differences in sensitivity matrices, and achieve the effect of weakening influence, reducing workload and difficulty, and reducing dependence.
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[0047] The scheme of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0048] Such as figure 1 As shown, the computer-aided adjustment method based on interferometry and sensitivity matrix includes the following steps:
[0049] Step 1, coarse adjustment:
[0050] Adjust the entire interferometric system to the initial measurement position, fix the aspheric surface to be measured on the four-dimensional adjustment frame, and adjust the four-dimensional adjustment frame until the concentric circular interference fringes appear in the image acquisition window of the interferometer. At this time, the rough adjustment is considered to be completed;
[0051] Wherein, the initial position refers to the position where the distance between the center of the aspheric surface to be tested and the center of the standard spherical mirror is the sum of the radii of curvature of the two.
[0052] The aspherical p...
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