Four-mass block micromechanical gyroscope capable of being directly coupled in angular rate sensitive direction

Abstract

The invention belongs to the field of micromechanical gyroscopes and in particular relates to a four-mass block micromechanical gyroscope capable of being directly coupled in an angular rate sensitive direction. The four-mass block micromechanical gyroscope comprises four mass blocks of the same structure, two driving coupling beams on the outer side, two groups of central coupling beams and a detection coupling beam. Drive frames of the four mass blocks are connected by virtue of the two driving coupling beams on the outer side and the two groups of central coupling beams so as to realize direct coupling in the driving direction. Detection frames of the four mass blocks are connected by virtue of the detection coupling beam so as to realize direct coupling in the angular rate sensitive direction. The four-mass block micromechanical gyroscope structure is in a holohedral symmetry manner along the drive and detection directions. According to the four-mass block micromechanical gyroscope disclosed by the invention, an outside vibration signal can be decomposed into two components along the drive direction and the detection direction, while the output signal of the detection frame of the four mass blocks can eliminate the influences of the two components by virtue of a difference method, so that the influence of external vibration on the micromechanical gyroscope is eliminated.

Description

technical field [0001] The invention belongs to the field of micro-mechanical gyroscopes, in particular to a four-mass-block micro-mechanical gyroscope directly coupled with angular rate sensitive directions. Background technique [0002] The micromechanical gyroscope can sensitively measure the angular velocity of the carrier in the inertial space, and has the advantages of small size and easy mass production, so it is widely used in the fields of inertial navigation and guidance. Current research in this field mainly focuses on single-mass and dual-mass structures, with an emphasis on realizing the decoupling of the driving mode and detection mode motion of the micromechanical gyroscope. [0003] In order to further improve the performance of micro-machined gyroscopes, a small number of four-mass micro-machined gyroscopes have been proposed in recent years. The gyro units have realized the decoupling of the driving mode and the detection mode. A single-anchor four-mass ME...

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Problems solved by technology

However, from the perspective of the four-mass micromechanical gyro as a whole, multiple gyro units are independent of each other. Under the vibration excitation of the external environment, the overall driving mode and detection mode have multiple motion modes, but the required driving mode There is only one useful motion for the detection mode and the detection mode, so the interference signal generated by the environmental vibration is bound to be mixed with the angular rate signal sensitive to the micro-mechanical gyroscope, which makes it difficult to separate the performance of the micro-mechanical gyroscope in the static and vibration states. As a result, the application range of micromechanical gyroscopes is greatly limited

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