Lens adjustment device and adjustment method

Abstract

The invention discloses a lens adjustment device and an adjustment method. The adjustment device comprises a first lens seat, a second lens seat, an inclination adjustment module, an air gap adjustment module and an eccentric adjustment module, wherein the upper surface of the first lens seat is provided with an inclination angle; the first lens seat is arranged on the second lens seat; the inclination adjustment module is arranged between the second lens seat and the first lens seat and comprises at least one washer with a through hole arranged in the middle, the upper surface and the lower surface of the washer are both provided with inclination angles, and the washer rotates along the circumference relative to the first lens seat; the air gap adjustment module comprises a plurality of bosses arranged on the lower surface of the second lens seat and a plurality of steps arranged on the upper surface of the inclination adjustment module and with positions corresponding to the bosses, and the second lens seat rotates relative to the inclination adjustment module; and the eccentric adjustment module is arranged on the first lens seat or the second lens seat and drives the first lens seat or the second lens seat to move horizontally. Online adjustment of the lens group is realized, the assembly risks caused by multiple times of lens group assembly and disassembly are reduced, and the production efficiency is improved.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing equipment, in particular to a lens adjustment device and adjustment method. Background technique [0002] There are usually multiple lenses in the optical system. As the precision requirements of the optical system become higher and higher, the requirements for the relative position between the lenses are also higher and higher. Therefore, it is usually necessary to adjust the eccentricity, tilt Parameters such as lens and air gap are strictly limited. Generally, the eccentricity, inclination, and air gap between lenses cannot be guaranteed by direct installation, and need to be realized through adjustment. In addition, the optical system has higher and higher requirements for stability, so for optical lenses that do not need to move during work, they are usually fixed rigidly during installation, while parameters such as eccentricity, inclination, and air gap between lenses can onl...

AI Technical Summary

Problems solved by technology

[0004] The invention provides an adjustment device and adjustment method for lenses to solve the problems of high risk, troublesome disassembly and assembly and long cycle in the prior art

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