Manufacturing method of crystalline silicon battery piece
A manufacturing method and technology of crystalline silicon cells, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the problems of enterprise economic loss, appearance identification, and trouble shooting of manufacturing enterprises, so as to solve the problems of whitening after sintering, The effect of anti-PID function improvement
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[0019] In order to describe the technical content of the present invention more clearly, further description will be given below in conjunction with specific embodiments.
[0020] The manufacturing method of the crystalline silicon battery sheet of the present invention comprises the tubular PECVD coating step, and the described tubular PECVD coating step comprises carrying out N in the tubular PECVD. 2 O treatment and at least two silicon nitride layer coatings, said N after the first silicon nitride layer coating 2 O treatment, the crystalline silicon battery sheet has no whitening phenomenon after sintering and has anti-PID performance.
[0021] In a specific embodiment provided by the present invention, said N 2 O treatment to purge the silicon nitride layer to form N 2 Oxide layer.
[0022] In a specific embodiment provided by the present invention, said N 2 The process parameters in the O treatment include: power 5000-6500w, pressure 1600-2500mtorr, flow rate 3000-60...
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