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Microwave plasma system and waveguide coaxial converter thereof

A microwave plasma, waveguide coaxial technology, applied in the directions of plasma, waveguide type devices, electrical components, etc., can solve the problems of poor stability of microwave plasma system, achieve high transmission capacity and efficiency, simple structure, and convenient debugging Effect

Pending Publication Date: 2017-11-07
PNC PROCESS SYSTEMS CO LTD
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Problems solved by technology

[0004] The purpose of the present invention is to provide a waveguide coaxial converter, which effectively solves the problems of poor stability in the use of microwave plasma systems; another purpose of the present invention is to provide a waveguide coaxial converter comprising the above waveguide coaxial Microwave Plasma System for Shaft Converter

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  • Microwave plasma system and waveguide coaxial converter thereof

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Embodiment Construction

[0023] The core of the present invention is to provide a waveguide coaxial converter, the waveguide coaxial converter effectively solves the problems of poor stability of the microwave plasma system; another core of the present invention is to provide a waveguide coaxial converter comprising the above-mentioned Microwave plasma system for shaft converters.

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0025] Please refer to figure 1 , figure 1 It is a schematic structural diagram of a microwave plasma...

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Abstract

The invention discloses a waveguide coaxial converter of a microwave plasma system. The waveguide coaxial converter is connected with a horizontally arranged tuner (3) and a vertically arranged coaxial line conductor component. A hollow cavity is arranged inside. One end of the cavity is provided with an opening which is connected with the output port of the tuner (3). A cone (4) is arranged in the cavity. A first circular hole is arranged along the axis of the cone (4). A coaxial inner conductor (5) is inserted in the first circular hole. The waveguide coaxial converter effectively solves the problems of poor use stability and the like of the microwave plasma system. The invention further discloses the microwave plasma system including the waveguide coaxial converter.

Description

technical field [0001] The invention relates to the technical field of preform rod processing equipment, in particular to a waveguide coaxial converter. In addition, the present invention also relates to a microwave plasma system comprising the above-mentioned waveguide-coaxial converter. Background technique [0002] PCVD, or plasma chemical vapor deposition, is one of the main processes for processing optical fiber preforms. The microwave plasma system is a unique part of this process that is different from other processes, and is the core part. The microwave plasma system consists of a microwave head installed horizontally on a moving stage, an isolator, a three-pin adjuster, a waveguide component, a coaxial component installed vertically, and a plasma resonant cavity. The waveguide part and the vertically mounted coaxial part are connected together by a waveguide-to-coaxial converter. The waveguide coaxial converter not only changes the electromagnetic wave energy from...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P5/103H05H1/46
CPCH01P5/103H05H1/46H05H1/461
Inventor 高玉桥孙效义连海洲
Owner PNC PROCESS SYSTEMS CO LTD
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