Flexible mechanism and gantry device containing flexible mechanism

A flexible and gantry technology, which is applied in the field of flexible mechanisms and gantry devices containing the flexible mechanism, can solve problems such as inappropriateness and reduction of deformation tolerance, and achieve the effect of avoiding motion hysteresis or reproduction errors

Active Publication Date: 2017-11-24
HIWIN MIKROSYST
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Specifically, such as figure 1 In the gantry device 1 provided by the known technology shown, a flexible mechanism 4 that allows deformation is provided on one side of the beam 3 straddling the pedestal 2. Accordingly, when the relative movement between the two ends of the beam 3 and the pedestal 2 occurs When there is an error, the flexible mechanism 4 can allow the change in the position and angle of the beam 3 caused by the synchronous motion error, so as to avoid causing undue stress to the beam 3; the deformation tolerance effect achieved by reducing the rigidity of the flexible mechanism 4 itself , it can achieve its expected purpose, but the low rigidity of the flexible mechanism 4 will also cause the hysteresis phenomenon of the crossbeam 3 during movement, which is not yet a good design

Method used

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  • Flexible mechanism and gantry device containing flexible mechanism
  • Flexible mechanism and gantry device containing flexible mechanism
  • Flexible mechanism and gantry device containing flexible mechanism

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Embodiment Construction

[0030] First, see figure 2 , 3 As shown, the gantry device 10 provided in one embodiment of the present invention mainly includes a seat 20 , a beam 30 , a first flexible mechanism 40 and a second flexible mechanism 50 .

[0031] The seat 20 has a seat body 21, two uprights 22 are respectively fixed on the two ends of the seat surface on the side of the seat body, and two separated guide grooves 23 are respectively provided on the upper side seat surface of the seat body 21, and are parallel to each other. Extending a proper length along a straight line, two driving parts 24 composed of linear motors are respectively arranged at the top of the column 22 .

[0032] The beam 30 has first and second sliding joints 31, 32, which are respectively connected to the driving parts 24 to slide in the guide grooves 23, and can be guided by the guide grooves 23 along a virtual first Axial x moves back and forth in a straight line. A beam body 33 is located above the seat body 21 and be...

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Abstract

The invention provides a flexible mechanism and a gantry device comprising the flexible mechanism. The flexible mechanism comprises a first coupling piece, a second coupling piece, a first flexible part and a second flexible part, wherein the rigidity of the first flexible part is larger than that of the second flexible part, so that the deformation resistance of the first flexible part in the first axial direction is improved; and the gantry device comprises a base, a beam and a first flexible mechanism, the rigidity of the first flexible part of the first flexible mechanism is larger than that of the second flexible part, so that the deformation resistance of the first flexible part in the first axial direction is improved. The flexible mechanism is used for providing compensation for the position space errors caused by the factors such as motion errors and deformation of a gantry cross beam, and the flexible parts can improve the rigidity relative to the moving axial direction where external force is exerted on the cross beam, so that the cross beam is protected against the hysteresis phenomenon in motion.

Description

technical field [0001] The present invention relates to a moving platform, in particular to a flexible mechanism and a gantry device containing the flexible mechanism. Background technique [0002] Due to limitations in structural rigidity, manufacturing, assembly, and control technology, geometric errors or spatial surface errors generated by the movement of the motion base are unavoidable. In order to reduce the impact of position errors on movement, known technologies There are mechanisms to achieve error compensation through different technical means. In addition to calibrating the motion path through technologies such as laser interferometers to reduce or eliminate the occurrence of errors, there are also buffering or deformation technologies to avoid motion errors when they occur. Undue torque caused by the motion pedestal or eliminate its stress. [0003] Specifically, such as figure 1 In the gantry device 1 provided by the known technology shown, a flexible mechani...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23Q1/01B23Q11/00
CPCB23Q1/012B23Q11/00
Inventor 何长政陈宜文
Owner HIWIN MIKROSYST
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