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Method and system of testing verticality of two surfaces of object

A technology of verticality and surface measurement, applied in measurement devices, instruments, optical devices, etc., can solve problems such as difficulty in result processing and measurement, achieve the effect of simple and convenient test method, improve measurement efficiency, and omit the result processing process

Inactive Publication Date: 2017-11-24
GOERTEK INC
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Problems solved by technology

[0003] In order to solve the problems of measurement difficulty and difficult result processing of the perpendicularity of the two planes of the test object in the prior art, the present invention provides a test method and system for the perpendicularity of the two planes of the test object

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Embodiment Construction

[0024] In order to make the purpose, technical solution and advantages of the present invention clearer, the following will further describe the implementation of the present invention in detail in conjunction with the accompanying drawings.

[0025] figure 1 It is a flow chart of the testing method of the present invention. This test method includes:

[0026] In step S100, a half mirror and a photodetector are arranged around the object, and the central axis of the half mirror and the central axis of the photodetector form an acute angle of 45 degrees.

[0027] In step S101, a parallel light beam of a certain diameter is incident on the half-mirror, and the parallel beam is divided into two parts after being incident on the half-mirror, one part is reflected to the first surface to be measured of the object, and the first surface to be measured is Then part of the light beam is reflected to the first position of the light detector; another part is transmitted to the second ...

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Abstract

The invention discloses a method and system of testing verticality of two surfaces of an object. The method of testing verticality of two surfaces of an object includes the steps: dividing a parallel beam with certain diameter into two parts after entering a semitransparent mirror through incidence, wherein one part of beam is reflected to the first position of an optical detector by the first surface to be tested of the object, and the other part of beam is reflected to the second position of the optical detector by the second surface to be tested of the object; adjusting the placing angle of the object, fixing the object and recording the second position when the first position is coincided with the center of the optical detector; and according to the second position and the vertical distance between the first surface to be tested and the optical detector, acquiring the vertical deviation degree between the first surface to be tested and the second surface to be tested. The method of testing verticality of two surfaces of an object can directly acquire the vertical deviation degree and the vertical deviation direction between the two surfaces of the object only according to the position of the beam which is reflected to the optical detector and the vertical distance between the surface to be tested and the optical detector, thus saving the complicated result processing process, and being efficient, simple and convenient.

Description

technical field [0001] The invention relates to the field of optical measurement and testing, in particular to a method and system for testing the perpendicularity of two planes of an object. Background technique [0002] In the prior art, tools such as vertical angle gauges, precision gauges, and three-dimensional measuring beds are usually used to measure the perpendicularity of two surfaces. The operation is complicated and it is not easy to detect the perpendicularity of the tiny object plane. Existing optical measurement systems can measure tiny objects to be measured, and use digital image processing technology to process light interference fringes to obtain the offset angle and offset direction of the two surfaces. The processing results are relatively complicated, which is not conducive to quickly obtaining processing results . Therefore, it is necessary to provide a measurement method and device to solve the problems of measurement difficulty and result processing ...

Claims

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Application Information

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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 丁卫涛
Owner GOERTEK INC
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