Novel arrayed photoelectric sensor grating displacement detection system and method
A technology of photoelectric sensor and grating displacement, which is applied to convert sensor output and use optical devices to transmit sensor components, instruments, etc., to achieve the effects of fast detection speed, high measurement accuracy, and avoidance of short circuits.
Inactive Publication Date: 2017-12-12
GUANGDONG UNIV OF TECH
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[0006] The existence of the above problems brings challenges to the high-speed and high-precision displacement positioning of electronic manufacturing equipment, which needs to be solved urgently
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[0038] The present invention will be further described below in conjunction with specific embodiment:
[0039] See attached Figure 1-3 As shown, a novel array photoelectric sensor grating displacement detection system described in this embodiment includes a parallel light source 1, an incremental glass grating scale 2, a photoelectric sensor array 3, a signal processing unit 4, a displacement display unit 5 and a high-speed voltage Comparator 6; wherein, the incremental glass grating scale 2 is vertically parallel to the irradiation direction of the light source 1; the photoelectric sensor array 3 is placed in the grating pitch of the incremental glass grating scale 2, and is uniformly distributed in a stepped manner, between the photoelectric sensors The upper and lower distance L=(grating height H-the number of photoelectric sensors n*photoelectric sensor height K) / (the number of photoelectric sensors n-1), the misalignment distance between photoelectric sensors D=(grid pit...
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The invention relates to a novel arrayed photoelectric sensor grating displacement detection system and a method. The system comprises a parallel light source, an incremental glass grating ruler, a photoelectric sensor array, a signal processing unit, a displacement display unit and a high speed voltage comparator, wherein the incremental glass grating ruler is perpendicular to an illuminating direction of the parallel light source; the photoelectric sensor array is placed in a grating distance of the incremental glass grating ruler and uniformly distributed in a stepped manner; the high speed voltage comparator is connected between the photoelectric sensor array and the signal processing unit, reshapes a signal output by the photoelectric sensor array and performs level conversion on the square signal obtained by reshaping; the signal processing unit is connected with the displacement display unit; and a calculated displacement value is displayed on the displacement display unit. The system and the method have the advantages of simple composition, low detection cost, high measurement precision, high detection speed, high practicability and the like.
Description
technical field [0001] The invention relates to the technical field of precision measurement, in particular to a novel array photoelectric sensor grating displacement detection system and method. Background technique [0002] In the field of precision measurement, a grating ruler is often used as a displacement feedback device, which uses the grating optical principle to perform precise displacement or angle measurement. [0003] The existing grating rulers mainly include incremental grating rulers and absolute grating rulers. Among them, the incremental grating ruler relies on the light source to shine on the uniform reticle on the glass or metal surface, and interferes with the indicating grating after transmission or reflection to produce light and dark moiré fringes. By counting the number of fringes, the moving distance is counted . According to the requirements of measurement accuracy, Moiré fringes can be subdivided. Due to the digital subdivision of analog signals,...
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IPC IPC(8): G01B11/02
CPCG01B11/02G01D5/34715G01D5/38G01D5/26G01B11/026
Inventor 杨志军李彦锋蔡铁根李乾陈新
Owner GUANGDONG UNIV OF TECH