Platform for preventing solution on substrate back face from diffusing
A platform and substrate technology, applied in the field of flat coating equipment, can solve the problems of pipeline vacuum pump corrosion, coating solution pollution, etc., and achieve the effect of improving production efficiency, improving product quality, and reducing impact
Active Publication Date: 2017-12-15
VIGOR GAS PURIFICATION TECHNOLOGIES (SUZHOU) CO LTD
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Problems solved by technology
Flexible substrates or rigid substrates placed side by side on the coating platform are in the process of completing the coating, such as figure 1 In this case, because there is a small gap between two adjacent substrates A and B, the coating solution penetrates through the gap and contaminates the back of the substrate.
If the platform is an adsorption platform, the permeated solution may also be absorbed into the exhaust line, which may cause corrosion of the pipeline or vacuum pump
Method used
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[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0033] Such as Figure 2-3 As shown, an embodiment of the present invention is: a platform for preventing the diffusion of the solution on the back side of the substrate, used for the plane support positioning of the bottom surface of the substrate 5, including the platform body 1, and the platform body 1 is provided with a platform lower than the surface of the platform body. The lyophobic groove 2 is arranged at the junction of two adjacent substrates 5 .
[003...
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The invention provides a platform for preventing a solution on the substrate back face from diffusing. The platform is used for plane supporting positioning of the substrate bottom face and comprises a platform body. The platform body is provided with a liquid draining groove which is lower than the surface of the platform body. The liquid draining groove is formed at the joint position of two adjacent substrates. The phenomenon that the solution penetrating through a narrow gap between two substrate sample pieces pollutes the back face can be effectively avoided through the liquid draining groove, the influence on an adsorption channel system by the solution penetrating through is reduced, and the product quality and production efficiency are improved.
Description
technical field [0001] The invention relates to a flat-plate coating device, in particular to a platform for preventing solution diffusion on the back side of a substrate. Background technique [0002] The extrusion coating method is widely used in new industries such as new thin-film solar cells, new display materials, optical functional films, and environmental protection permeable films due to its precise film quality controllability. Flexible substrates or rigid substrates placed side by side on the coating platform are in the process of completing the coating, such as figure 1 In this case, because there is a small gap between two adjacent substrates A and B, the coating solution penetrates through the gap and contaminates the back of the substrate. If the platform is an adsorption platform, the permeate solution may also be absorbed into the exhaust line, which may cause corrosion of the pipe or vacuum pump. Contents of the invention [0003] In order to overcome t...
Claims
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Login to View More IPC IPC(8): B05C11/00B05C11/10
CPCB05C11/00B05C11/1039
Inventor 冯宗宝欧阳俊波张海銮程园园章婷刘德昂曲亚东钱磊张德龙
Owner VIGOR GAS PURIFICATION TECHNOLOGIES (SUZHOU) CO LTD