Flexible wearable electronic strain sensor and manufacturing method thereof

Abstract

The invention relates to the sensor manufacturing and packaging technology field and discloses a flexible wearable electronic strain sensor and a manufacturing method thereof. The flexible wearable electronic strain sensor comprises a flexible substrate, wherein the flexible substrate internally has a flexible micro channel, the micro channel is internally provided with a liquid conductor or a semi-liquid conductor, and two ends of the micro channel are provided with electrodes. Wearable equipment has the flexible wearable electronic strain sensor. The manufacturing method of the flexible wearable electronic strain sensor comprises steps that the flexible substrate having the flexible micro channel is manufactured; the micro channel is internally injected with the liquid conductor or the semi-liquid conductor, and the electrodes are inserted at the two ends of the micro channel. The flexible wearable electronic strain sensor and the manufacturing method thereof are advantaged in that high flexibility, stretching property and thinness are realized, so the flexible wearable electronic strain sensor can be directly integrated with any flexible actuating mechanisms, sensitivity is high, anti-interference capability is strong, and the flexible wearable electronic strain sensor can normally operate even when strain reaches 300%.

Description

technical field [0001] The invention belongs to the technical field of sensor manufacturing and packaging, and in particular relates to a flexible wearable electronic strain sensor and a preparation method thereof. Background technique [0002] As the application requirements of the information age are getting higher and higher, the expectations and ideal requirements for various performance parameters such as the range, accuracy and stability of the measured information are gradually increasing. The sensor system applied to wearable devices has gradually shown its limitations in some applications, including that the current sensor is not flexible enough to be truly stretchable. Once the strain or bending angle is too large, the structure of the entire sensor will be lost. Failure due to damage; low sensitivity, susceptible to interference from human physiological signal noise, resulting in blurred and incomplete signal acquisition. [0003] Since Google held a developer co...

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Problems solved by technology

[0010] Although the above-mentioned strain sensor has a certain degree of flexibility, it cannot be truly stretched, lacks skin-like flexibility, and cannot fully realize the measurement of external loads under the condition of covering three-dimensional complex static / dynamic surfaces.

At large strains or bending angles, the entire system will fail

At the same time, relative to the surface of the human skin, it still shows a certain rigidity, which will cause some discomfort to the human body, making it difficult to integrate, which greatly limits the stability, precision and accuracy of the measurement.

In addition, human physiological signals are easily disturbed by external factors, such as sweat stains, muscle contraction, etc., and users cannot rule out these influencing factors, resulting in fuzzy and incomplete data collection, and poor reliability

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