Gas cabinet control system and method

A control system and gas cabinet technology, applied in general control systems, control/regulation systems, electrical program control, etc., can solve the problems of poor reliability, production impact, and high system costs, and achieve the effect of low cost

Active Publication Date: 2017-12-15
江苏正帆半导体设备有限公司 +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existing non-redundant PLC gas cabinet control system only includes one set of PLC. If the PLC stops running during the gas cabinet gas supply process, the gas cabinet control system will be in an uncontrolled state, affecting production and poor reliability.
However, the hardware red...

Method used

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  • Gas cabinet control system and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] figure 1 It is a schematic diagram of a gas cabinet control system provided in Embodiment 1 of the present invention. The control system can be applied to a gas supply system, but is not limited to a gas supply system. The system is controlled by the auxiliary PLC and the main PLC in cooperation with each other. see figure 1 , the gas cabinet control system includes:

[0022] The main PLC10 is used to perform the air supply control function in the working state;

[0023] Auxiliary PLC 20, connected with the main PLC 10, is used to monitor the failure of the main PLC 10 in the follow-up operation state, then switch from the follow-up operation state to the temporary operation state, and is used to execute a part in the temporary operation state Air supply control function.

[0024] Among them, the main PLC10 can be OMRON CJ series; the working state of the main PLC10 refers to the normal operation state; the fault state of the main PLC10 refers to the stop operation...

Embodiment 2

[0029] figure 2 It is a schematic diagram of a gas cabinet control system provided by Embodiment 2 of the present invention. This embodiment is an optimization of the foregoing embodiments.

[0030] see figure 2 , in this embodiment, the main PLC 10 includes a first valve control unit, which is connected to each valve in the electromagnetic valve group 30, and is used to send a valve control signal to each of the valves to control each of the valves. The switching state of the valve. The primary PLC 10 also includes a normal signal sending unit, configured to send a normal signal to the secondary PLC 20 in a normal working state.

[0031] The auxiliary PLC20 includes: a fault detection unit, which is connected to the main PLC10, and is used to monitor the failure of the main PLC10 in the follow-up operation state. Specifically, when a normal signal cannot be received, it is determined that the main PLC10 is faulty, Then switch from the following running state to the temp...

Embodiment 3

[0038] image 3 It is a schematic diagram of a gas cabinet control system provided by Embodiment 3 of the present invention. This embodiment is an optimization of the foregoing embodiments.

[0039] see image 3 , in this embodiment, the gas cabinet control system also includes:

[0040] The signal branching module 40 is used to receive the input safety signal, branch it into at least two safety signals, and output it from the signal output terminal. The signal branching module 40 may be a relay. When receiving an input safety signal, the electromagnetic coil of the relay is charged, causing multiple contacts of the relay to close, and completing the branching of the safety signal. The safety signal includes at least one of the following: emergency stop signal, fire alarm signal, high temperature switch signal and gas leakage signal.

[0041] Optionally, the main PLC 10 also includes a first input terminal, which is connected to the signal output terminal of the signal bra...

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PUM

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Abstract

The embodiment of the invention discloses a gas cabinet control system and method. The control system comprises: a main PLC configured to execute an gas feed control function in a working state; and an auxiliary PLC connected with the main PLC and configured to switch a following operation state to a temporary operation state when it is monitored that there are faults of the main PLC in a following operation state and execute the partial gas feed control function in the temporary operation state. The gas cabinet control system and method are provided, the auxiliary PLC can execute the partial gas feed control function while the main PLC has faults, the system configuration is simple, the cost is low and the reliability is high.

Description

technical field [0001] Embodiments of the present invention relate to electrical control technology, and in particular to a gas cabinet control system and method. Background technique [0002] In the semiconductor manufacturing process, it is necessary to continuously and stably supply the required gas in the container for processing and preparing the semiconductor, and the gas supply operation is generally performed through the gas supply system. [0003] Gas cabinets are commonly used gas supply systems, including gas cylinder cabinets, gas cylinders, gas supply pipelines, pneumatic valves, panels and gas cabinet control systems. The gas cabinet control system includes power supply, programmable logic controller (Programmable Logic Controller, PLC), safety components, electromagnetic valve group, relay, and the core component is PLC. [0004] The existing non-redundant PLC gas cabinet control system includes only one set of PLC. If the PLC stops running during the gas cab...

Claims

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Application Information

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IPC IPC(8): G05B19/05
CPCG05B19/058Y02P90/02
Inventor 李俊芳于锋
Owner 江苏正帆半导体设备有限公司
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