Automatic photomask multifunctional overturn inspection machine

Abstract

The present invention discloses an automatic photomask multifunctional overturn inspection machine. The machine comprises an inspection machine main body and a duplex piece, symmetrical FFU air filters are arranged at the upper end of the inspection machine main body, the FFU air filters are tightly fixed with the inspection machine main body, FFU controllers are arranged at the top portions of the FFU air filters, and the bottom portions of the FFU controllers are in contact with the surfaces of the FFU air filters. Through combination of an air source processing mode of a traditional duplexpiece and the inspection machine main body, the automatic photomask multifunctional overturn inspection machine can detect work of an object such as device operation states, processing conditions, defects, shapes and sizes and also can utilize an overturn bench to perform 360-degree overturning of workpieces so that a cleanliness grade of a detection area is improved and an operation safety is improved; and moreover, when safe drawing rope ensures device operation, personnel cannot enter the device, and once the drawing rope is moved by people to cause sudden stopping of the device so that operators' safety is ensured.

Description

technical field [0001] The invention relates to the technical field of flipping inspection machines, in particular to an automatic photomask multifunctional flipping inspection machine. Background technique [0002] Automated photomask multi-function flip inspection machine is now an era of rapid economic and technological development. With the rapid development of the machinery manufacturing industry, the continuous improvement and improvement of product quality and manufacturing accuracy, the requirements for dual parts and equipment are also increasing. come higher. To strengthen the research on detection technology in the automated machinery manufacturing system, to ensure the quality of machinery manufacturing and quickly realize the automation of detection equipment, it can not only eliminate the errors caused by some human factors as much as possible, but also make the detection results more stable and obtain higher Credibility and continuous improvement of labor pro...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide an automatic photomask multi-function flip inspection machine to solve the above-mentioned background technology that currently uses manual flip. As the size of the product becomes larger and larger, manual operation can no longer meet the actual production requirements, and at the same time, manual operation is easy. The problem of damage to the glass substrate

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