A scanning probe detection device
A detection device and scanning probe technology, applied in scanning probe technology, instruments, etc., can solve the problems of small size, low surface reflection efficiency, micro-cantilever micro-offset detection, etc., and achieve the effect of avoiding detection blind spots.
Active Publication Date: 2018-12-14
WUHAN RAYCUS FIBER LASER TECHNOLOGY CO LTD
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] The purpose of the present invention is to provide a scanning probe detection device, which aims to solve the problem that the existing displacement detection device cannot detect the micro-deflection of the micro-cantilever whose size is getting smaller and whose surface reflection efficiency is not high
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0025] Such as figure 1 As shown, the embodiment of the present invention provides a scanning probe detection device, including a laser light source 3, a dichroic prism 4, a small aperture diaphragm 5, a lens group 6, and a microcantilever 2 arranged sequentially along the incident light path, and the lens group 6 Form a semi-concentric resonant cavity with the micro-cantilever 2, the lens group 6 is composed of single or multiple lenses, the surface of the le...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a detection device of a scanning probe. The detection device comprises a laser light source, a beam splitting prism, a small-hole diaphragm, a lens group and a micro-cantileverwhich are sequentially arranged along a light path, a half-concentric resonant cavity is formed by the lens group and the micro-cantilever, the surface, facing the micro-cantilever, of the lens groupis a concave spherical surface, the concave spherical surface is plated with partial transmittance film with high reflectivity, the center of the concave spherical surface is located on the micro-cantilever, the surface of the micro-cantilever is provided with a reflective layer, and one side of the beam splitting prism is also provided with a photoelectric detector for receiving interference light emitted from the half-concentric resonant cavity. According to the detection device, by adopting the half-concentric resonant cavity formed by the lens group and the micro-cantilever and conductingmulti-light-beam interference on light beams, the deviation of the micro-cantilever which is small in size and not high in surface reflectivity can be detected.
Description
technical field [0001] The invention relates to offset detection transposition, in particular to a scanning probe detection device. Background technique [0002] Scanning probe microscopy technology relies on its ultra-high resolution, real-time imaging, no damage to the sample, and no special requirements for the sample (not limited by its conductivity, dryness, shape, hardness, purity, etc.), and can be used in the atmosphere and at room temperature The advantages of imaging in the environment or even in solution, etc., have been widely used in the fields of surface detection and nanoprocessing. The scanning probe microscope obtains the surface topography of the sample by sensing the change of the atomic force between the probe and the sample, and the precise detection of the deflection of the micro-cantilever is the requirement of the scanning probe microscope for real imaging of the sample. [0003] At present, researchers at home and abroad have proposed and developed ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01Q20/02
Inventor 王文娟卢昆忠
Owner WUHAN RAYCUS FIBER LASER TECHNOLOGY CO LTD