Ceramic capacitive pressure transducer with medium sensitivity resistance and manufacturing method thereof
A technology of pressure sensor and ceramic capacitor, which is applied in the field of capacitive pressure sensor and its manufacture, ceramic capacitive pressure sensor and its manufacturing field, can solve the problems such as the impact of product capacity, achieve no change in capacity, no drift in capacity, and high product reliability Effect
Pending Publication Date: 2018-01-16
襄阳臻芯传感科技有限公司
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Problems solved by technology
The ceramic capacitive pressure sensor made of this kind of electrode pattern is sensitive to the measurement medium, and different measurement mediums, such as water, will have a great impact on the capacity of the product
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[0029] In order to enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in this application will be clearly and completely described below in conjunction with embodiments.
[0030] Such as Figure 4 As shown, it is an anti-medium sensitive ceramic capacitive pressure sensor disclosed by the present invention, which includes an elastic thin substrate 1 and a thick substrate 3, and the thin elastic substrate 1 is provided with a thin substrate metal electrode 6; A thick substrate metal electrode 9, a ring metal electrode 10 and a thick substrate electrode pad 11 are provided; and the elastic thin substrate 1 and the thick substrate 3 are packaged together by a sealing material 2; the graphic area of the thin substrate metal electrode 6 is Cover at least the sum of the pattern areas of the thick substrate metal electrode 9 and the thick substrate electrode pad 11 .
[0031] Such as Figure 5 As shown, the gr...
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The invention discloses a ceramic capacitive pressure transducer with medium sensitivity resistance and a manufacturing method thereof. The ceramic capacitive pressure transducer comprises an elasticthin substrate and a thick substrate, a thin substrate metal electrode is arranged on the elastic thin substrate, a thick substrate metal electrode, an annular metal electrode and a thick substrate electrode pad are arranged on the thick substrate, the elastic thin substrate and the thick substrate are packaged together through a sealing material, and the pattern area of the thin substrate metal electrode at least covers the sum of the pattern areas of the thick substrate metal electrode and the thick substrate electrode pad. According to the pressure transducer, the problem of the compatibility of the conventional ceramic capacitive pressure transducer in different measuring medium conditions and the problem of capacity drift due to water or water vapor on the surface of an elastic thin plate can be solved.
Description
technical field [0001] The invention relates to a capacitive pressure sensor and a manufacturing method thereof, in particular to a medium-resistant ceramic capacitive pressure sensor and a manufacturing method thereof, belonging to the technical field of pressure sensors. Background technique [0002] At present, ceramic capacitive pressure sensors are equipped with electrodes on opposite sides of two thick and thin ceramic substrates, and ceramic balls or glass isolation piers are used as spacers to control the distance between electrodes to form a capacitor with a specified initial capacitance value. When the ceramic substrate is subjected to external pressure, the thin substrate will be deformed, resulting in a change in capacitance value, and the external pressure on the substrate can be detected based on this capacitance change value. The electrode pattern of this ceramic capacitive pressure sensor, such as figure 2 Shown is a flexible thin electrode such as image 3...
Claims
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Login to View More IPC IPC(8): G01L1/14G01L9/12
Inventor 廖景昌赵兴奎
Owner 襄阳臻芯传感科技有限公司