Bias control used for capacitance micro-processing ultrasonic transducer
A capacitive micromachining, ultrasonic transducer technology, applied in the direction of the fluid using vibration
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[0027] Some implementations herein include techniques and arrangements for selectively changing the vertical aperture size and / or apodization pattern for a CMUT, an element or subelement of a CMUT array, or other CMUT. For example, changes in aperture and / or apodization can be achieved by adjusting the bias voltage applied to selected regions of the CMUT. As an example, different bias voltages may be applied at different bias controllable regions in a CMUT, which enables the properties of the CMUT to vary individually in these different bias controllable regions. Accordingly, in some cases, the bias voltage can be adjusted to control the effective aperture size and / or apodization pattern of the CMUT. Furthermore, in some implementations, the bias voltage can be varied over time such that the effective aperture size and / or apodization pattern of the CMUT can be correspondingly varied over time. This change may be continuous or discrete, such as a change comprising multiple ste...
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