Plane surface shape error online detection device and method based on sample plate interference method
A surface error and detection device technology, applied to measuring devices, optical devices, instruments, etc., can solve the problem of high cost of interferometers and achieve low-cost effects
Active Publication Date: 2018-02-27
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology
Due to the high cost of interferometers, many private optical processing factories are unable to purchase them, so they hope to find a high-precision, low-cost, and convenient surface error detection method for planar optical parts
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[0026] In the drawings, the same or similar reference numerals are used to denote the same or similar elements or elements having the same or similar functions. Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0027]In the description of the present invention, the terms "central", "longitudinal", "transverse", "front", "rear", "left", "right", "vertical", "horizontal", "top", " The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or element Must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the scope of the invention.
[0028] Such as figure 1 and figur...
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The invention discloses a plane surface shape error online detection device and method based on a sample plate interference method. The device comprises a sample plate, a to-be-tested piece, a plane LED light source, an interference fringe collecting unit, a plane surface shape error detection unit and a control unit; the front face of the plane LED light source is an illumination face and is opposite to the sample plate; the plane LED light source is used for providing uniform illumination light of various wavelengths, and illumination light sources of at least two selected wavelengths are used for illuminating the sample plate and the to-be-tested piece in a time sharing mode successively; the interference fringe collecting unit is used for collecting and outputting equal thickness interference fringe images; the plane surface shape error detection unit is used for obtaining the strength change of the same point on the equal thickness interference fringe images under illumination ofdifferent wavelengths to obtain the absolute optical path difference of the point, and in this way, absolute optical path differences of all points on the detected plane are determined to obtain the surface shape error of the detected plane of the to-be-tested piece. The plane surface shape error online detection device and method can achieve objective, automatic, high-precision, low-cost plane optical component surface shape error detection.
Description
technical field [0001] The invention relates to a surface shape error detection system of a plane optical part, in particular to an on-line detection device and method for a plane surface shape error based on a template interference method. Background technique [0002] At present, the common surface error detection methods of planar optical parts in optical processing include template interferometry and laser interferometer. Template interferometry is a means of surface shape error that can be measured online. Its detection cost is low and it is widely used in optical workshops. However, this method is highly subjective, the accuracy is limited by the experience of the testing personnel, and the efficiency is low. The laser interferometer method mainly includes detection forms such as Fizeau interferometer and Tieman Green interferometer. The laser interferometer method is a high-precision off-line measurement method, which requires optical components to be placed on the ...
Claims
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Login to View More IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 王姗姗朱秋东翟慕岳
Owner BEIJING INSTITUTE OF TECHNOLOGYGY