Integrated force sensor

A pressure sensor and sensor technology, applied in the field of sensors, can solve the problems of film irreversible damage, plastic deformation, fracture, etc.

Pending Publication Date: 2018-02-27
FOSHAN SENSICFUSION TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is a fatal problem: since the force is directly applied to the surface of the silicon membrane of the pressure sensor, when the overload pressure is applied to the silicon membrane, the membrane will easily be irreversibly damaged, and the damage mechanism includes plastic deformation. (such as metal) and fracture, etc.
Therefore, the overload of traditional force sensors should generally not exceed 150%.

Method used

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Embodiment Construction

[0019] In the present invention, unless otherwise clearly specified and limited, if there are terms "assembled", "connected" and "connected", the terms should be interpreted in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral ground connection; it can also be a mechanical connection; it can be directly connected, or connected through an intermediary, or two components can be connected internally. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

[0020] In the invention, unless otherwise specified and limited, a first feature being "on" or "under" a second feature may include that the first and second features are in direct contact, or that the first and second features are not in direct contact. contact but through another feature contact between them. Moreover, "above", "below" and "above" the first feature on the second featu...

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PUM

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Abstract

The invention discloses an integrated force sensor. The integrated force sensor is characterized by including a base body, a flexible through cavity arranged on the base body, and flexible skin covering the flexible through cavity; the base body is provided with a bulge, the flexible through cavity is divided into two sections under the action of the bulge, one end of the flexible through cavity is connected with a pressure sensor for measuring the internal pressure of the flexible through cavity, and the other end of the flexible through cavity is communicated with outside air. According to the integrated force sensor, to-be-detected force changes air pressure by changing the shape of an object, so that the size of the to-be-detected force is detected through detection of the air pressure; moreover, overloaded pressure can be released through a pressure releasing mechanism so that the safety of the film of the pressure sensor cannot be affected, and even the pressure which is overloaded more than static pressure by 100 times cannot cause permanent damage to the film.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an integrated force sensor. Background technique [0002] Existing force sensors measure force through piezoresistive sensitive elements (metal or silicon-doped devices). The measurement principle is: when the force is applied, it will cause the stress concentration of the silicon film, which will cause the resistance value change of the piezoresistive sensitive element, and the resistance value change can be converted into a voltage change through the Wheatstone bridge. These products are characterized by high sensitivity. However, there is a fatal problem: since the force is directly applied to the surface of the silicon film of the pressure sensor, when the overload pressure is applied to the silicon film, the film will easily be irreversibly damaged, and the damage mechanism includes plastic deformation. (such as metal) and fracture, etc. Therefore, the overload of traditi...

Claims

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Application Information

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IPC IPC(8): G01L1/02
CPCG01L1/02
Inventor 刘昶
Owner FOSHAN SENSICFUSION TECH CO LTD
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