Mixed compensating type subaperture spliced surface shape detection method

Abstract

The invention discloses a mixed compensating type sub-aperture spliced surface shape detection method. During the sub-aperture spliced surface shape detection process, the area of the single sub-aperture measurement is enlarged on the premise that a small CGH compensator is adopted. Therefore, the number of required sub-apertures is effectively reduced. The error transmission is reduced, and the number of the required compensators is reduced at the same time. The sub-aperture splicing detection means is combined with the mixed compensation means of a lens and a CGH compensator, so that the usage constraint of the adopted CGH compensator within a single compensation detection region, namely a sub-aperture range, can be avoided. The number of sub-apertures required by the convex aspheric surface of the same specification is reduced. As a result, the time cost needed by optical element adjustment and subsequent splicing calculation is reduced. Meanwhile, the number of required CGH compensators is reduced. The detection economic cost is reduced. The transmission and the accumulation of splicing errors are reduced, and the detection precision is improved.

Description

technical field [0001] The invention relates to the technical field of mirror surface detection, in particular to a hybrid compensation type sub-aperture splicing surface shape detection method. Background technique [0002] Due to the increase in the degree of freedom, aspheric optical elements have significant advantages in correcting aberrations, improving image quality, and reducing the size and quality of imaging systems. Therefore, aspheric optical elements are becoming more and more popular. It is used in space optics, military defense, high-tech civilian and other fields. Especially in the field of space optics, the secondary mirrors of astronomical telescopes are usually super-large-diameter convex aspheric mirrors. For example, the secondary mirror of the JWST Space Telescope, which is about to replace the Hubble Telescope, has reached 738mm, and the secondary mirrors of some ground-based astronomical telescopes are even larger. As high as several meters, for exam...

AI Technical Summary

Problems solved by technology

For lens-compensated sub-aperture splicing detection, since the lens compensator is composed of at least two lenses, it is inevitable to introduce adjustment errors, and the reference surface of the compensator is generally an aspheric surface, which is not only difficult to process, but also requires additional Therefore, the manufacturing cost of large-diameter lens compensators is high. When inspecting super-large-diameter convex aspheric surfaces, different compensators need to be manufactured for different annular zones, which greatly increases the inspection cost; and for CGH compensators 3 For example, limited by the existing manufacturing process of CGH, its manufacturing diameter generally does not exceed 200mm under the condition of ensuring accuracy. With the increase of the diameter of the convex aspheric surface, when the diameter is larger than 1m, more rings are required. The sub-aperture covers it with full aperture, which not only brings about the increase of time cost in detection operation and data calculation, but more importantly, the increase in economic cost caused by the need to manufacture corresponding compensation devices for different sub-apertures

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