Flexible film vertical vacuum coating production line

Abstract

The invention discloses a vertical type vacuum coating production line for flexible thin films. The production line comprises multiple coating sublines, each subline is used for independently carryingout vertical type coating of thin films, each subline at least comprises an unreeling chamber, a coating chamber and a reeling chamber along the thin film expansion direction, a main drive roller isarranged in the unreeling chamber and the reeling chamber, multiple driving rollers are arranged in each chamber of the subline, and a tension force detection roller and a tension force adjusting roller are arranged in at least one chamber of the subline; wherein the tension force detection roller and the tension force adjusting roller are adjacently arranged, the tension force detection roller isused for real time monitoring tension of the thin film, the tension force adjusting roller is used for adjusting self rotating speed according to feedback of the tension force detection roller in order to adjust transmission speed of the thin film in each chamber, the tension force adjusting roller is a non-driving roller, and the expansion track of the thin film through the tension force detection roller and the tension force adjusting roller is a non-linear track. The vertical type vacuum coating production line for flexible thin films has the advantages of short element diffusion path without intermediate products and element evaporation, and high thin film efficiency; and the production line is especially suitable for large-area and large-scale industrial production.

Description

technical field [0001] The invention relates to a flexible film vertical vacuum coating production line, which belongs to the field of new energy manufacturing. Background technique [0002] CIGS solar cell, a chalcopyrite crystal thin film solar cell with an optimal ratio of four elements: Cu (copper), In (indium), Ga (gallium), and Se (selenium). CIGS solar cells have a layered structure and absorbing materials It belongs to group I-III-VI compounds, and its substrate is generally made of stainless steel, glass or flexible film substrate, which is the key technology for forming solar panels. This product has many advantages such as strong light absorption capacity, good power generation stability, high conversion efficiency, long daytime power generation time, high power generation, low production cost and short energy recovery cycle. CIGS solar cells generally use vacuum sputtering, evaporation or other non-vacuum methods to deposit multi-layer films respectively to form...

AI Technical Summary

Problems solved by technology

But so far, this potential has not been fully realized. The most fundamental reason is that the traditional CIGS thin-film battery technology ("co-evaporation" and "post-selenization") has inherent defects, the process is too complicated, and the battery yield rate is generally lower than 60%. %, unable to reflect its low-cost advantage

In the prior art, the production of CIGS thin-film solar cells is based on the production equipment of glass substrates. Such equipment has low integration and cannot overcome the technical difficulties brought about by the nature of the thin film itself.

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