Evaporation device
A technology of evaporation and equipment, which is applied in the field of evaporation equipment, can solve the problems of low production efficiency and complicated operation process, and achieve the effects of improving production efficiency, simplifying operation process and saving costs
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no. 1 example
[0041] image 3 It is a schematic structural diagram of the evaporation equipment according to the first embodiment of the present invention. From image 3 It can be seen from the figure that the evaporation equipment includes a plurality of evaporation sources for evaporating the substrate 10 . In this embodiment, the substrate 10 moves at a velocity V. As shown in FIG. In this embodiment, the first evaporation source 11, the second evaporation source 12 and the third evaporation source 13 are shown in sequence, and different organic materials are respectively arranged in the three evaporation sources. The evaporation source releases the gas of the organic material to form the evaporation device 14 on the substrate 10. The non-evaporation area on the substrate 10 is blocked by the mask plate 15. The mask plate 15 moves along with the substrate 10 . The evaporation equipment also includes a partition 20 for adjusting the evaporation range of each evaporation source.
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no. 2 example
[0049] Figure 4a It is a schematic structural diagram of the evaporation equipment according to the second embodiment of the present invention. This embodiment is an extension of the first embodiment. The main structure of the evaporation equipment is basically the same as that of the first embodiment. The difference from the first embodiment is that in this embodiment, the first end of the separator 20 can be It is detachably connected to the evaporation surface 31 of the evaporation source.
[0050] From Figure 4a It can be seen that a connection mechanism 40 is provided between adjacent evaporation sources on the evaporation surface 31, and the first end of the separator 20 is detachably connected to the connection mechanism 40. Figure 4b It is a structural schematic diagram of the connecting mechanism 40 . The upper part of the connecting mechanism 40 is provided with a first card slot 41, and the first end of the separator 20 is provided with a first card body 42, a...
no. 3 example
[0054] Figure 5 It is a schematic structural diagram of the evaporation equipment according to the third embodiment of the present invention. This embodiment is an extension of the second embodiment. The main structure of the evaporation equipment is basically the same as that of the second embodiment. The difference from the second embodiment is that in this embodiment, the partition can be rotated.
[0055] From Figure 5 As can be seen from the figure, the second end of the partition 20 is also provided with a first rotating mechanism 50 capable of rotating the partition 20. Figure 6 It is a schematic structural diagram of the first rotating mechanism in the third embodiment of the present invention. From Figure 6 It can be seen from the figure that the first rotating mechanism 50 includes a first rotating shaft located at the bottom of the connecting mechanism 40, and the first rotating shaft 51 is driven to rotate by a motor, so that the separator 20 rotates to adj...
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