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Masking plate, positioning substrate, masking plate assembly and vacuum evaporation apparatus

Active Publication Date: 2018-04-17
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Embodiments of the present invention provide a mask, a positioning substrate, a mask assembly, and an evaporation device, which can improve the problem of decreased product yield due to the fluidity of the mask

Method used

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  • Masking plate, positioning substrate, masking plate assembly and vacuum evaporation apparatus
  • Masking plate, positioning substrate, masking plate assembly and vacuum evaporation apparatus
  • Masking plate, positioning substrate, masking plate assembly and vacuum evaporation apparatus

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Embodiment Construction

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0039] The Fine Metal Mask (FMM for short) in the prior art has two names, and the names of each part in the present invention are: a mask (a mask integrated frame), including a frame, A mask sheet (mask plate), the mask sheet includes an effective evaporation area (the mask sheet includes a patterned pattern area).

[0040] The mask plate provided by the present invention, such as image 3 As shown, it includes a frame 200 with an opening and a plurality of ...

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Abstract

The invention provides a masking plate, a positioning substrate, a masking plate assembly and a vacuum evaporation apparatus, and relates to the field of a display technology. The problem that productyield is reduced due to fluidity of masks can be improved. The masking plate comprises a framework with openings and multiple masks which span the openings and are fixed on the framework. The mask comprises effective mask areas and an ineffective mask area which encircles the effective mask areas, and also comprises first positioning structures which are arranged in the ineffective mask area andpositioned on the surface of the mask vertical to the thickness direction. The first positioning structure is used for avoiding the mask from moving in a first direction. The first direction intersects the extension direction of the mask.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask, a positioning substrate, a mask assembly and an evaporation device. Background technique [0002] OLED (Organic Light-Emitting Diode, organic light-emitting diode) display device has thin, light, wide viewing angle, active light emission, continuously adjustable light color, low cost, fast response speed, low energy consumption, low driving voltage, and operating temperature range Wide, simple production process, high luminous efficiency and flexible display, etc., have been listed as a promising next-generation display technology. [0003] In the prior art, when an OLED display device is produced by an evaporation device, the structure in the evaporation device is as follows: figure 1 As shown, it includes an evaporation source 10 , a metal mask 20 , a back glass 30 , a cooling plate 40 , and a magnetic spacer 50 arranged in sequence along a direction away from the eva...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 吕守华黄俊杰
Owner BOE TECH GRP CO LTD