Waveguide-Coaxial Converter for Microwave Plasma-Enhanced Chemical Vapor Deposition
A technology of microwave plasma and enhanced chemistry, applied in the directions of plasma, waveguide-type devices, electrical components, etc., can solve the problems of low coaxial conversion efficiency of waveguides, electrode pollution, etc., achieve safe and controllable microwave leakage, prevent electrode pollution, The effect of good application prospects
Inactive Publication Date: 2019-12-27
NAT UNIV OF DEFENSE TECH
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Problems solved by technology
[0008] The technical problem to be solved by the present invention is to overcome the disadvantages of low waveguide coaxial conversion efficiency and easy pollution of electrodes during microwave heating, and provide a new type of high conversion efficiency, simple structure, ventilation, and water cooling to prevent electrode pollution. Waveguide to Coaxial Converter
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[0031] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0032] A waveguide-to-coaxial converter for microwave plasma enhanced chemical vapor deposition, consisting of a feed-in waveguide, a PTFE baffle, a rectangular waveguide cavity, a tapered pyramid copper block, a water-cooled aluminum block, a ventilated circular waveguide, a shielding net, and a short circuit It consists of a slider, a standing wave cavity, a coaxial inner conductor and a coaxial outer conductor. Wherein, the feed-in waveguide is connected to the bottom of the rectangular waveguide cavity, and the middle is separated by a polytetrafluoroethylene plate. A tapered copper block is placed at the center of the wide side of the rectangular waveguide cavity. The tapered copper block is connected to the coaxial inner conductor, and the right side of the rectangular waveguide cavity is connected to the coaxial outer conductor. The...
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The invention relates to a waveguide coaxial converter in the technical field of microwave plasma enhanced chemical vapor deposition, in particular to a microwave plasma enhanced chemical vapor deposition device, which can support microwave high-efficiency transmission and low electrode pollution rectangular waveguide coaxial conversion device. Consists of feed-in waveguide, PTFE baffle, rectangular waveguide cavity, tapered copper block, water-cooled aluminum block, ventilated circular waveguide, shielding net, short-circuit slider, standing wave cavity, coaxial inner conductor and coaxial outer conductor Composition; the present invention adopts an all-metal gradient structure, and the transmission efficiency can reach a level close to 100%; adopts a water-cooled structure and a ventilated air-cooled structure, which can reduce the temperature of the coaxial section and the pyramidal gradient aluminum block, and prevent electrode pollution as much as possible; The size selection of shielding mesh and ventilated circular waveguide ensures safe and controllable microwave leakage.
Description
technical field [0001] The invention relates to a waveguide coaxial converter in the technical field of microwave plasma enhanced chemical vapor deposition, in particular to a microwave plasma enhanced chemical vapor deposition device, which can support microwave high-efficiency transmission and low electrode pollution rectangular waveguide coaxial conversion device. Background technique [0002] In recent years, under the dual pressure of limited supply of conventional energy (coal, oil) and increasingly serious environmental pollution, renewable energy represented by solar energy occupies an increasingly important position in the future human energy structure. With its characteristics of no pollution, no transportation, no monopoly, simple maintenance, safe operation, and inexhaustibility, solar energy is recognized as one of the best options to solve the two major problems of energy and the environment. Countries including China, the United States, France and Germany hav...
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IPC IPC(8): H01P5/103H05H1/46
CPCH01P5/103H05H1/46H05H1/4622
Inventor 李国林邱永峰张泽海杜广星
Owner NAT UNIV OF DEFENSE TECH