Novel partial-pressure mass spectrometer calibration device and method

Abstract

The invention provides a novel partial-pressure mass spectrometer calibration device, which mainly comprises a fine adjustment valve, a piston pressure meter, a sample preparation chamber, a pluralityof high-purity gas cylinders, a capacitive film vacuum meter, a first-stage sample feeding chamber, a second-stage sample feeding chamber, a sampling chamber, a small hole, a calibration chamber, a separation gauge and an air pumping system. The sample preparation chamber is respectively connected with the piston pressure meter and the capacitive film vacuum gauge. The sample preparation chamberis also connected with the plurality of high-purity gas cylinders which are connected in parallel through the fine adjustment valve. A plurality of sampling chambers with different volumes are connected between the sample preparation chamber and the first-stage sample feeding chamber in parallel. A plurality of sampling chambers with different volumes are connected between the first-stage sample feeding chamber and the second-stage sample feeding chamber in parallel. The second-stage sample feeding chamber is sequentially connected with the small hole and the calibration chamber in sequence. The calibration chamber is respectively connected with a to-be-calibrated differential pressure mass spectrometer and the separation gauge. The sample preparation chamber, the first-stage sample feeding chamber, the second-stage sample feeding chamber and the calibration chamber are connected with the air pumping system. According to the invention, actually required mixed gases can be configured according to customer requirements. In addition, it is ensured that gases do not change in the calibration process.

Description

technical field [0001] The invention relates to a novel partial pressure mass spectrometer calibration device and method, belonging to the technical field of vacuum measurement. Background technique [0002] Partial pressure mass spectrometers are widely used in various fields of industrial production, and the calibration of partial pressure mass spectrometers is an important research direction in the field of vacuum measurement. The document "Robert E.Ellefson.Methods for in situ QMScalibration for partial pressure andomposition analysis.Vacuum, 2014" introduces a partial pressure mass spectrometer calibration device, which combines two calibration methods: (1) direct the known group The mixed gas is introduced into the calibration chamber through a thin tube, and the partial pressure value of each component is obtained through a series of theoretical calculations with an ionization vacuum gauge as a reference standard; (2) First introduce a high-pressure mixed gas of about...

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Problems solved by technology

[0003] The disadvantages of this system are: (1) only the prepared mixed gas with known components can be used for calibration, and the gas cannot be prepared according to actual needs; The gas state is a viscous flow state, and the gas state changes to a molecular flow state after sample injection, resulting in a change in the composition of the mixed gas after sample injection, requiring complex theoretical calculations to correct the calibration results; (3) The reference standards used are respectively It is an ionization vacuum gauge and a capacitance film vacuum gauge, which leads to a large measurement uncertainty in its calibration results

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