The invention provides a novel partial-pressure
mass spectrometer calibration device, which mainly comprises a fine adjustment valve, a
piston pressure meter, a
sample preparation chamber, a pluralityof high-purity gas cylinders, a capacitive film vacuum meter, a first-stage sample feeding chamber, a second-stage sample feeding chamber, a sampling chamber, a
small hole, a calibration chamber, a separation gauge and an air pumping
system. The
sample preparation chamber is respectively connected with the
piston pressure meter and the capacitive film vacuum gauge. The
sample preparation chamberis also connected with the plurality of high-purity gas cylinders which are connected in parallel through the fine adjustment valve. A plurality of sampling chambers with different volumes are connected between the sample preparation chamber and the first-stage sample feeding chamber in parallel. A plurality of sampling chambers with different volumes are connected between the first-stage sample feeding chamber and the second-stage sample feeding chamber in parallel. The second-stage sample feeding chamber is sequentially connected with the
small hole and the calibration chamber in sequence. The calibration chamber is respectively connected with a to-be-calibrated
differential pressure mass spectrometer and the separation gauge. The sample preparation chamber, the first-stage sample feeding chamber, the second-stage sample feeding chamber and the calibration chamber are connected with the air pumping
system. According to the invention, actually required mixed gases can be configured according to
customer requirements. In addition, it is ensured that gases do not change in the calibration process.