RF Power Analog Controller
A technology of radio frequency power supply and controller, which is applied in the direction of simulator, program control, computer control, etc. It can solve the problems that the analog quantity detection cannot be recorded in real time, the feedback status cannot be monitored in real time, and the detection results are inaccurate, etc., so as to achieve convenient radio frequency power supply The effect of stable operation and output, convenient monitoring, and accurate detection results
Active Publication Date: 2020-12-15
江苏神州半导体科技有限公司
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Problems solved by technology
However, the use of artificially satisfying INTERLOCK, through external power supply and mechanical switch control, multimeter detection and output analog to control the RF power supply, will lead to complex control, a lot of equipment required, and analog detection cannot be recorded and fed back in real time. Many problems such as inability to monitor in real time and inaccurate test results
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[0015] To make the objectives, technical solutions and advantages of the present invention will become more apparent from, the accompanying drawings and in conjunction with the following specific examples further illustrate the present invention. It will be appreciated that the specific embodiments described herein are intended to explain the invention and is not intended to limit the invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art are in the range of the present invention without making creative labor premise.
[0016] like figure 1 , The analog RF power controller comprising a main control board and the SMPS (Switching Power Supply) connected to the main control board, a control device, an external input port, a control port (25PIN), alarm indicator, the state of the switch, the monitoring port , monitoring equipment, and the terminal device INTERLOCK meter display.
[0017] Control port (25PIN) f...
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The invention relates to an analog controller for a radiofrequency power supply. The analog controller for the radiofrequency power supply comprises a main control board, as well as an SMPS, a controlcomponent, an external input port, a control port, an alarm indicator, a state switch, a monitoring port, monitoring equipment, terminal equipment INTERLOCK and a meter head display which are connected with the main control board, wherein the monitoring equipment is connected with the monitoring port. The analog controller for the radiofrequency power supply, provided by the invention, can achieve easy control, needs less equipment, can record an analog quantity detection result in real time, can monitor a fed-back state in real time, can provide an accurate detection result, can convenientlymonitor the operation and output stability performance of the radiofrequency power supply in real time so as to provide a basis for judging the overall performance of the radiofrequency power supply,and can meet needs of practical application very well.
Description
Technical field [0001] The present invention relates to a radio-frequency power analog controller. Background technique [0002] RF power has been widely applied to the semiconductor chips, liquid crystal panels, solar, LED manufacturing art. RF power is one of the important components of the whole manufacturing apparatus. But equipment manufacturers almost all foreign companies, equipment control strictly technical blockade, resulting in a lot of industries will learn how to use the equipment without control. RF power is due to the high operating frequency, output power, the harsh operating environment prone to damage and failure. RF power for particular fault analysis and maintenance and need to know more in control and test methods, so in this case requires the operator and maintenance personnel can easily control the RF power supply, to complete the acquisition of basic information, to the overall equipment failure judgment to provide evidence. Since currently only provides T...
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IPC IPC(8): G05B19/048
CPCG05B19/048
Inventor 刘锐朱国俊
Owner 江苏神州半导体科技有限公司